{"id":"W4392463849","doi":"10.2139/ssrn.4748239","title":"Highly Sensitivity, Self-Actuated Aluminum-Based Resonant Mems Humidity Sensor","year":2024,"lang":"en","type":"preprint","venue":"SSRN Electronic Journal","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Sensitivity (control systems); Microelectromechanical systems; Materials science; Humidity; Aluminium; Optoelectronics; Acoustics; Electronic engineering; Composite material; Engineering; Physics; Meteorology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow","research_integrity"],"consensus_categories":[],"category_scores_codex":[0.002764701,0.0007353995,0.0008482101,0.0002047494,0.0002920298,0.0003533769,0.0004831836,0.0004188489,0.0003515804],"category_scores_gemma":[0.00006202332,0.0005922555,0.0008922452,0.0002742426,0.00007925278,0.00005972269,0.0007779518,0.01171578,0.0004189888],"about_ca_system_candidate":true,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00129068,"about_ca_system_score_gemma":0.006641435,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004276705,"about_ca_topic_score_gemma":0.0001491403,"domain_scores_codex":[0.9935378,0.0003554056,0.0007831178,0.0009115278,0.000856139,0.003555943],"domain_scores_gemma":[0.9980126,0.0003137233,0.0003695346,0.0005725811,0.0002501617,0.0004814086],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"theoretical_or_conceptual","study_design_gemma":"theoretical_or_conceptual","study_design_scores_codex":[0.0003309074,0.00138119,0.000781043,0.0003239318,0.003782111,0.0003284003,0.0001966453,0.000603428,0.004768381,0.8804481,0.001710791,0.105345],"study_design_scores_gemma":[0.0008956984,0.0003192733,0.00007523315,0.0003454648,0.0006457763,0.00007532614,0.0002443597,0.01680346,0.006675801,0.9616272,0.01115787,0.001134538],"study_design_candidate":"theoretical_or_conceptual","study_design_consensus":"theoretical_or_conceptual","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9350382,0.002855321,0.04672709,0.005629519,0.003165226,0.001022113,0.0003368045,0.0005715466,0.004654166],"genre_scores_gemma":[0.9951225,0.000254419,0.0005280792,0.0001137694,0.002231188,0.00002666966,0.00009485232,0.0001215774,0.001506933],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1042105,"threshold_uncertainty_score":0.9996529,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01054471317523746,"score_gpt":0.2493573977141751,"score_spread":0.2388126845389377,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}