{"id":"W4392693166","doi":"10.1117/12.3001110","title":"Deep ICP-RIE etched trenches with sidewall slope control of GaAs-based high-power 905nm pulsed laser diodes","year":2024,"lang":"en","type":"article","venue":"","topic":"Nanowire Synthesis and Applications","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Laserax (Canada)","funders":"","keywords":"Materials science; Reactive-ion etching; Etching (microfabrication); Wafer; Optoelectronics; Fabrication; Dry etching; Inductively coupled plasma; Deep reactive-ion etching; Diode; Trench; Nanotechnology; Plasma","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.0001027169,0.0002021675,0.0002808906,0.00009985833,0.00003122102,0.00005596268,0.0001395248,0.00008148283,0.001153438],"category_scores_gemma":[0.00001509476,0.0001447971,0.00008995341,0.0002810485,0.00005333411,0.0000895661,0.000007997177,0.0001038334,0.00008941689],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003294521,"about_ca_system_score_gemma":0.00003883542,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004524482,"about_ca_topic_score_gemma":0.0001477472,"domain_scores_codex":[0.9990986,0.00001698964,0.0002629078,0.0002247441,0.0001680924,0.0002286712],"domain_scores_gemma":[0.9992564,0.0002744733,0.0000220433,0.0003224686,0.00004524837,0.00007936836],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002181786,0.0008487356,0.001830022,0.00124719,0.001902785,0.00008503718,0.001158288,0.2473736,0.6332815,0.03182996,0.01312585,0.06709886],"study_design_scores_gemma":[0.001544582,0.0001428202,0.002564531,0.0002066912,0.000234572,0.000003126047,0.0001449581,0.2508643,0.7219592,0.0005221221,0.02112662,0.00068645],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.4949509,0.002090822,0.45266,0.002667776,0.0003153196,0.001036752,0.0001399077,0.002128383,0.04401013],"genre_scores_gemma":[0.9968032,0.00001261855,0.002335346,0.00007153986,0.00004114936,0.0001345466,0.00001458781,0.00005316533,0.0005338666],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.5018523,"threshold_uncertainty_score":0.9997596,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00487726309418443,"score_gpt":0.1900041397822723,"score_spread":0.1851268766880879,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}