{"id":"W4392812275","doi":"10.1021/acsaelm.4c00062","title":"Autocatalytic Deposition of Nickel–Boron Diffusion Barrier onto Diazonium-Treated SiO<sub>2</sub> for High Aspect Ratio Through-Silicon Via Technology in 3D Integration","year":2024,"lang":"en","type":"article","venue":"ACS Applied Electronic Materials","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal; CMC Microsystems (Canada)","funders":"","keywords":"Boron; Silicon; Nickel; Autocatalysis; Materials science; Deposition (geology); Diffusion barrier; Diffusion; Chemical engineering; Metallurgy; Nanotechnology; Inorganic chemistry; Chemistry; Catalysis; Organic chemistry; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007762437,0.0002416255,0.000149277,0.0001253416,0.0001271898,0.0002527582,0.0002797652,0.0002093305,0.0003535759],"category_scores_gemma":[0.0001037714,0.0002038056,0.0001269557,0.00008368886,0.0001775322,0.0001937541,0.0002311439,0.0001639395,0.0001828707],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002074487,"about_ca_system_score_gemma":0.0001639728,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005537368,"about_ca_topic_score_gemma":0.001291818,"domain_scores_codex":[0.9999428,0.000004914048,0.000003232657,0.00001319063,0.00002243637,0.00001350821],"domain_scores_gemma":[0.999962,0.000005796418,0.0000119249,0.000006518916,0.000007706554,0.000006011403],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009971861,0.000005183852,0.0001039321,0.00002622427,0.000002437544,0.00003274581,0.00001479515,0.0001245796,0.998541,0.00009143066,0.00002376016,0.001024043],"study_design_scores_gemma":[0.000002863746,0.00005216618,0.0005189038,0.000001670475,0.00000385774,0.00005408659,0.00001198852,0.001873695,0.9969323,0.00001755802,0.0005277476,0.00000326581],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9911075,0.0004715627,0.00640867,0.00003853342,0.00003609311,0.00002002045,0.00005918765,0.0001360202,0.001722449],"genre_scores_gemma":[0.9926921,0.000309555,0.006270168,0.000009222807,0.000003780667,0.000009164711,0.00002419799,0.00001286207,0.0006690227],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0005537368,"threshold_uncertainty_score":0.001505196,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004673756652078683,"score_gpt":0.2091228622706639,"score_spread":0.2044491056185852,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}