{"id":"W4394855704","doi":"10.1116/6.0003372","title":"Cryogenic etching of positively tapered silicon pillars with controllable profiles","year":2024,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Nanowire Synthesis and Applications","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Nanopillar; Silicon; Etching (microfabrication); Materials science; Passivation; Fabrication; Reactive-ion etching; Optoelectronics; LOCOS; Nanotechnology; Apex (geometry); Monocrystalline silicon; Nanostructure; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009172637,0.0002863923,0.0001418547,0.0001326004,0.0001318795,0.0002670644,0.000302879,0.0002072008,0.0004256455],"category_scores_gemma":[0.0001875469,0.0002325801,0.0001815042,0.0001149726,0.0001911809,0.0002007667,0.0002622598,0.000297748,0.0002601721],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002208922,"about_ca_system_score_gemma":0.0001595,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004924315,"about_ca_topic_score_gemma":0.001146148,"domain_scores_codex":[0.9999009,0.000005119025,0.000006593054,0.00002608054,0.00003569192,0.00002563778],"domain_scores_gemma":[0.9997924,0.00003362828,0.00007843232,0.00004717804,0.00003224881,0.0000160772],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009543622,0.000003909201,0.00006784467,0.00001569079,0.000002382202,0.00004988664,0.00001865275,0.0001120708,0.998736,0.00009848538,0.00003452332,0.0008511473],"study_design_scores_gemma":[0.000002831021,0.00004537464,0.0007660849,0.000002160462,0.000003138111,0.00007030751,0.00001370111,0.0007777295,0.9973872,0.00001662858,0.0009108283,0.000004009458],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9803106,0.0006184359,0.0152219,0.00005886231,0.00005229429,0.00003374127,0.0002507716,0.0001582727,0.00329516],"genre_scores_gemma":[0.9817841,0.0004997683,0.01595423,0.00003139757,0.00001397926,0.00002224269,0.0001695492,0.00006444243,0.001460296],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0004924315,"threshold_uncertainty_score":0.001602709,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005903926378336083,"score_gpt":0.1993357433613171,"score_spread":0.193431816982981,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}