{"id":"W4394855704","doi":"10.1116/6.0003372","title":"Cryogenic etching of positively tapered silicon pillars with controllable profiles","year":2024,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Nanowire Synthesis and Applications","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Nanopillar; Silicon; Etching (microfabrication); Materials science; Passivation; Fabrication; Reactive-ion etching; Optoelectronics; LOCOS; Nanotechnology; Apex (geometry); Monocrystalline silicon; Nanostructure; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001544229,0.00021017,0.0004389632,0.001288862,0.0003079096,0.0001491001,0.0003780868,0.0001781004,0.0000038839],"category_scores_gemma":[0.00004602691,0.000158506,0.000024435,0.001331287,0.001280924,0.0003697038,0.00006720071,0.0003068976,5.409531e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001854535,"about_ca_system_score_gemma":0.000642603,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001313043,"about_ca_topic_score_gemma":0.000002343837,"domain_scores_codex":[0.9984577,0.0000132388,0.0004864708,0.0002853726,0.0002934942,0.0004637619],"domain_scores_gemma":[0.9991415,0.0000177133,0.0002146565,0.000154882,0.0004182666,0.00005299128],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003838841,0.00002548224,0.00003702774,0.0001730126,0.00006672162,0.000003022324,0.0001129889,0.000009332037,0.9598905,0.0039166,0.000003586481,0.03572328],"study_design_scores_gemma":[0.000382337,0.0003959046,0.0000534621,0.0003930325,0.0001031508,0.000277918,0.0001804246,0.0001818676,0.9932195,0.004047054,0.0005966574,0.0001686961],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9641734,0.03288024,0.001625871,0.000813401,0.00009415171,0.0002020185,0.000005235853,0.0001584425,0.00004720882],"genre_scores_gemma":[0.9969732,0.001620744,0.001325563,0.000009194839,0.00002630178,0.00001708315,2.944439e-7,0.00002297447,0.000004678851],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03555458,"threshold_uncertainty_score":0.6463686,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005903926378336083,"score_gpt":0.1993357433613171,"score_spread":0.193431816982981,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}