{"id":"W4398187799","doi":"10.2139/ssrn.4835950","title":"High Sensitivity, Self-Actuated Aluminum-Based Resonant Mems Humidity Sensor","year":2024,"lang":"en","type":"preprint","venue":"SSRN Electronic Journal","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Sensitivity (control systems); Microelectromechanical systems; Materials science; Humidity; Aluminium; Optoelectronics; Acoustics; Electrical engineering; Environmental science; Electronic engineering; Engineering; Physics; Composite material; Meteorology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow","research_integrity"],"consensus_categories":[],"category_scores_codex":[0.00267273,0.0007228266,0.0008700232,0.0001913334,0.0002843402,0.0003353175,0.0004639993,0.0004121522,0.0005215083],"category_scores_gemma":[0.00006120426,0.0005820936,0.000828693,0.0002606947,0.00007674541,0.00005607045,0.0007703517,0.01171493,0.0003903157],"about_ca_system_candidate":true,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.001255937,"about_ca_system_score_gemma":0.006067587,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007209185,"about_ca_topic_score_gemma":0.000167943,"domain_scores_codex":[0.9937065,0.0003474971,0.0007691214,0.0008915642,0.0008317555,0.003453604],"domain_scores_gemma":[0.9980685,0.0003046182,0.0003684181,0.0005622911,0.0002415051,0.0004546435],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"theoretical_or_conceptual","study_design_gemma":"theoretical_or_conceptual","study_design_scores_codex":[0.0002562001,0.001040599,0.0004610947,0.0002309504,0.002962888,0.0002418079,0.0001221304,0.0007709654,0.002739714,0.9053602,0.001114813,0.08469861],"study_design_scores_gemma":[0.0008166404,0.0002681233,0.00007225653,0.0002821365,0.0005562415,0.00005998281,0.0001945644,0.01014816,0.005954753,0.9760627,0.004636609,0.0009478006],"study_design_candidate":"theoretical_or_conceptual","study_design_consensus":"theoretical_or_conceptual","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9461135,0.00172478,0.04204195,0.004091126,0.002835321,0.0007973439,0.0003031392,0.0004227987,0.001670032],"genre_scores_gemma":[0.9949975,0.00023289,0.0007559247,0.0001070864,0.002410049,0.00002639289,0.0001122972,0.0001187921,0.00123904],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.08375081,"threshold_uncertainty_score":0.9996631,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009603003443649439,"score_gpt":0.2448932501123906,"score_spread":0.2352902466687412,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}