{"id":"W4400079415","doi":"10.1016/j.nimb.2024.165439","title":"In Plasma ion beam analysis of polymer layer and adsorbed H monolayer etching","year":2024,"lang":"en","type":"article","venue":"Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Montréal","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Foundation for Innovation; Fonds de recherche du Québec – Nature et technologies; Ministère des relations internationales et de la Francophonie","keywords":"Elastic recoil detection; Sputtering; Analytical Chemistry (journal); Plasma; Etching (microfabrication); Plasma etching; Ion beam; Nuclear reaction analysis; Desorption; Materials science; Ion; Chemistry; Layer (electronics); Adsorption; Thin film; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000632481,0.0001620845,0.000354317,0.001045472,0.0001175681,0.0002911951,0.00005182652,0.00007564801,0.0001708103],"category_scores_gemma":[0.00001487215,0.0001371334,0.0000459205,0.001224563,0.00006733654,0.0006920399,0.00006683253,0.0004058696,0.000002173091],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008751553,"about_ca_system_score_gemma":0.0000122265,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001059989,"about_ca_topic_score_gemma":0.0001240681,"domain_scores_codex":[0.9987594,0.0001723154,0.0003538018,0.0003065534,0.0001752315,0.0002327018],"domain_scores_gemma":[0.9995261,0.0001772196,0.00004113891,0.0001349939,0.00005632221,0.00006419238],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009815054,0.00008590393,0.001046561,0.0001688749,0.000767559,0.000004846944,0.001576464,0.002129111,0.9512002,0.0007163532,0.00003524108,0.0421707],"study_design_scores_gemma":[0.0007292175,0.0002046345,0.006567554,0.0007155266,0.0003587847,0.00003988388,0.003757835,0.2533108,0.7276105,0.0006977885,0.005549476,0.0004580557],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9980448,0.0001104796,0.0007441764,0.00005577239,0.0004636295,0.0001311293,0.00002427079,0.00003941942,0.0003862958],"genre_scores_gemma":[0.9971365,0.0008269633,0.001771293,0.000009041345,0.00009064253,0.0000252106,0.000007834637,0.00003321601,0.00009925176],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2511816,"threshold_uncertainty_score":0.5592136,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03353209603469387,"score_gpt":0.3851946086464467,"score_spread":0.3516625126117529,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}