{"id":"W4401247467","doi":"10.23919/mixdes62605.2024.10614012","title":"Single Dopant Lithography for the Fabrication of Atomic-scale Devices and Quantum Systems","year":2024,"lang":"en","type":"article","venue":"","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Dopant; Fabrication; Lithography; Materials science; Atomic units; Optoelectronics; Quantum; Nanolithography; Nanotechnology; Physics; Doping; Quantum mechanics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000426797,0.0007285782,0.0005384178,0.0007675188,0.0005281956,0.0009346531,0.0007341519,0.0005925072,0.0105518],"category_scores_gemma":[0.0004543302,0.0004395778,0.000378541,0.0006844949,0.0006152657,0.0008167265,0.0008676093,0.001029604,0.006026337],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006246003,"about_ca_system_score_gemma":0.0003681364,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002457912,"about_ca_topic_score_gemma":0.0005479439,"domain_scores_codex":[0.9996024,0.00004778922,0.00003293855,0.00007088776,0.000218067,0.0000279707],"domain_scores_gemma":[0.999726,0.00008549232,0.00004730357,0.00009820522,0.00002913483,0.00001393831],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000540453,0.00006826939,0.0004703358,0.002023691,0.00006129003,0.0005511588,0.0002427709,0.002096393,0.6281743,0.1285951,0.01988739,0.2177753],"study_design_scores_gemma":[0.00002427952,0.0001468767,0.0007561282,0.0002351652,0.0000309304,0.00107972,0.00003406166,0.008297516,0.5393078,0.02446615,0.4255685,0.00005276705],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.02147681,0.04726506,0.8534994,0.001675799,0.001651217,0.0004707305,0.001735866,0.003839897,0.0683852],"genre_scores_gemma":[0.1113386,0.02612266,0.835364,0.0006959005,0.000348713,0.0005071983,0.001256022,0.0006998002,0.02366711],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.0105518,"threshold_uncertainty_score":0.0352993,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01847670659335359,"score_gpt":0.2265899966823403,"score_spread":0.2081132900889867,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}