{"id":"W4401258271","doi":"10.1116/6.0003711","title":"Fabrication of hollow silicon microneedles using grayscale lithography and deep reactive ion etching","year":2024,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Advancements in Transdermal Drug Delivery","field":"Pharmacology, Toxicology and Pharmaceutics","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Deep reactive-ion etching; Materials science; Resist; Reactive-ion etching; Silicon; Lithography; Etching (microfabrication); Photoresist; Fabrication; Nanotechnology; X-ray lithography; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00239552,0.0002753175,0.0004875473,0.001708463,0.0005123217,0.00008270073,0.0003530931,0.0004627482,0.00000737134],"category_scores_gemma":[0.0001181515,0.0002424949,0.00004138904,0.001122549,0.002221104,0.0005741477,0.0001480835,0.0008149503,3.900985e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001979529,"about_ca_system_score_gemma":0.0004318795,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00000428014,"about_ca_topic_score_gemma":0.000003758725,"domain_scores_codex":[0.9979584,0.0001055966,0.000686514,0.0004560513,0.0002578952,0.0005355357],"domain_scores_gemma":[0.9987149,0.00006404339,0.0005392542,0.000138505,0.0004588178,0.00008449803],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001788161,0.00009009331,0.0005090786,0.000286917,0.0001068575,0.000007961675,0.0006740487,0.00001036421,0.8945394,0.001307411,0.000002380603,0.1022866],"study_design_scores_gemma":[0.0008218163,0.0005078694,0.0001291952,0.0003401998,0.0002975932,0.00047023,0.0006005744,0.0005116437,0.9829386,0.01167155,0.001479497,0.0002311948],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.918424,0.07426074,0.005757022,0.0007755743,0.000447592,0.0002381748,0.000007600732,0.00007508718,0.00001420143],"genre_scores_gemma":[0.9886683,0.00895384,0.0022257,0.00005958824,0.00005916492,0.000008259466,9.805975e-7,0.00001997993,0.000004218789],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1020554,"threshold_uncertainty_score":0.9888653,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.04637354465108959,"score_gpt":0.3525783279603701,"score_spread":0.3062047833092806,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}