{"id":"W4401421799","doi":"10.1039/d4nr02610a","title":"Abrasive-free chemical-mechanical planarization (CMP) of gold for thin film nano-patterning","year":2024,"lang":"en","type":"article","venue":"Nanoscale","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique; University of Waterloo; Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"École Centrale de Lyon; Institut National des Sciences Appliquées de Lyon; Fonds de recherche du Québec – Nature et technologies; Université Grenoble Alpes; Natural Sciences and Engineering Research Council of Canada; CMC Microsystems; Université de Sherbrooke; Centre National de la Recherche Scientifique; Indian National Science Academy","keywords":"Chemical-mechanical planarization; Abrasive; Materials science; Nano-; Nanotechnology; Thin film; Composite material; Metallurgy; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001159519,0.0001486683,0.0001957794,0.00007718764,0.00001917737,0.00003378492,0.0002914957,0.0001784946,0.0000286962],"category_scores_gemma":[0.0001630117,0.0001538603,0.00008470031,0.0001607341,0.00002405907,0.0001987998,0.00006996311,0.000177464,0.00000904487],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00007596821,"about_ca_system_score_gemma":0.00001422094,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001239821,"about_ca_topic_score_gemma":0.000007716528,"domain_scores_codex":[0.9991372,0.000009976768,0.0002579433,0.0002092561,0.0001532454,0.0002323974],"domain_scores_gemma":[0.9993933,0.0001938141,0.00002748897,0.0002993796,0.00003555102,0.00005045811],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001058843,0.00001505793,0.00006535634,0.0004553614,0.00003154482,0.000003105081,0.000256732,0.00507431,0.9478747,0.004613983,0.03942964,0.002169568],"study_design_scores_gemma":[0.0001661822,0.00002887511,0.00001913266,0.0002386862,0.00001858101,0.000003549051,0.00002008699,0.109193,0.8726131,0.007887307,0.009626595,0.0001849557],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.1415419,0.000922538,0.8496035,0.0003835271,0.0009601591,0.0005783268,0.0004363466,0.003096534,0.002477197],"genre_scores_gemma":[0.9480037,0.00003524189,0.05124419,0.00005114079,0.0001132507,0.0000683863,0.00006934517,0.00008478592,0.0003299546],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.8064618,"threshold_uncertainty_score":0.6274239,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01133848423903161,"score_gpt":0.2469618358760895,"score_spread":0.2356233516370579,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}