{"id":"W4401871877","doi":"10.1117/12.3021426","title":"Advances in plasma-based atomic layer processing of AlF3 for the passivation of broadband aluminum mirrors","year":2024,"lang":"en","type":"article","venue":"","topic":"Ga2O3 and related materials","field":"Materials Science","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada","funders":"","keywords":"Atomic layer deposition; X-ray photoelectron spectroscopy; Plasma; Passivation; Materials science; Thin film; Aluminium; Coating; Layer (electronics); Deposition (geology); Nanotechnology; Optoelectronics; Optics; Physics; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005311053,0.0004343499,0.0002440764,0.0003823406,0.0001953459,0.0004640005,0.0004719911,0.0004808,0.0009818049],"category_scores_gemma":[0.0003332581,0.0002195708,0.0004574378,0.0003782787,0.0002069623,0.0006814938,0.0003171442,0.0006166644,0.0004837716],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005527428,"about_ca_system_score_gemma":0.0002893335,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008679706,"about_ca_topic_score_gemma":0.001016161,"domain_scores_codex":[0.9997894,0.0000199255,0.00001478345,0.00004232422,0.0001135697,0.00002002242],"domain_scores_gemma":[0.9998286,0.00002894539,0.00004853259,0.0000211931,0.00006177377,0.00001105665],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004744799,0.00003773587,0.0005576732,0.0003919103,0.00001776106,0.0001064875,0.00008390261,0.001011797,0.9578034,0.002821213,0.000369736,0.0367508],"study_design_scores_gemma":[0.00002739961,0.0004575434,0.004460169,0.00006551054,0.00004592774,0.000922387,0.00006210517,0.007813757,0.9370638,0.001016496,0.0480358,0.00002914205],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7145541,0.0849146,0.1530232,0.001346858,0.0003524373,0.000196299,0.0004239885,0.0007823125,0.04440639],"genre_scores_gemma":[0.8202782,0.0385712,0.1332731,0.0002561586,0.0001459185,0.00008461018,0.0004670749,0.0001186235,0.006805119],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009818049,"threshold_uncertainty_score":0.004010439,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02296886879911988,"score_gpt":0.2960713868615529,"score_spread":0.273102518062433,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}