{"id":"W4402455016","doi":"10.11159/icmie24.123","title":"Enhancing Sensitivity in Warpage Measurement and its Application to Mobile Electronic Components","year":2024,"lang":"en","type":"article","venue":"Proceedings of the World Congress on Mechanical, Chemical, and Material Engineering","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"","funders":"National Research Foundation of Korea; National Research Foundation","keywords":"Sensitivity (control systems); Computer science; Electronic engineering; Engineering","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003264138,0.0002049012,0.000239608,0.0001695557,0.00002408351,0.00005678464,0.0001268735,0.00005968766,0.000002569521],"category_scores_gemma":[0.00002644362,0.000183831,0.00003399359,0.0002863444,0.00001533311,0.0001165744,0.0001264899,0.0002060931,5.797441e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001291425,"about_ca_system_score_gemma":0.000004483232,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00000352306,"about_ca_topic_score_gemma":0.000004516893,"domain_scores_codex":[0.998952,0.000002966695,0.0002681805,0.0002820917,0.0002082723,0.000286479],"domain_scores_gemma":[0.9997485,0.00002668516,0.00002793552,0.00008533453,0.00004308987,0.00006849677],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002374874,0.00001486306,0.000002960655,0.0006024606,0.00002212529,4.903387e-7,0.00000898152,0.0002608336,0.9933701,0.005087957,0.00001708967,0.0005883479],"study_design_scores_gemma":[0.0001030877,0.00002836725,0.000008080089,0.0007543594,0.00001540058,0.000004104349,0.000007497134,0.02087059,0.976182,0.0003641598,0.001484653,0.0001777372],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9982232,0.00009671653,0.0001494901,0.00002739875,0.0003441655,0.000749162,0.00001003685,0.0003485194,0.00005128821],"genre_scores_gemma":[0.9985802,0.0001244587,0.0007787058,0.00001415195,0.00005286287,0.0003988423,0.000001081617,0.00004198345,0.000007719111],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02060976,"threshold_uncertainty_score":0.7496411,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005552125152365969,"score_gpt":0.2115510572342657,"score_spread":0.2059989320818997,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}