{"id":"W4403025608","doi":"10.2139/ssrn.4973328","title":"Fabrication of High Aspect Ratio Diamond Tip Using Reactive Ion Etching","year":2024,"lang":"en","type":"preprint","venue":"SSRN Electronic Journal","topic":"Diamond and Carbon-based Materials Research","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Fabrication; Reactive-ion etching; Diamond; Aspect ratio (aeronautics); Materials science; Etching (microfabrication); Nanotechnology; Optoelectronics; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001994789,0.0002922085,0.0004265834,0.000304624,0.0003275409,0.0004654189,0.000770556,0.0006213265,0.002642987],"category_scores_gemma":[0.0002589481,0.0003235568,0.0002082112,0.0002654051,0.0001312829,0.0003636749,0.0004138699,0.0005291518,0.001422157],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002213203,"about_ca_system_score_gemma":0.0002430625,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002281201,"about_ca_topic_score_gemma":0.0005364799,"domain_scores_codex":[0.9997627,0.000006476104,0.000009409055,0.00006771108,0.0001280766,0.00002553101],"domain_scores_gemma":[0.9998499,0.00002956384,0.00001891224,0.00003802979,0.00004749279,0.00001609272],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001646679,0.000009572623,0.0000819781,0.00006859044,0.000003222355,0.000105518,0.00002768792,0.00009025016,0.9923497,0.0004929806,0.0003951566,0.006358964],"study_design_scores_gemma":[0.00002048863,0.00009064059,0.0009793061,0.000004109577,0.000005298303,0.0003894812,0.00001927688,0.002213151,0.9870054,0.0002190107,0.009042036,0.00001180858],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7502524,0.002793853,0.2004794,0.0006619961,0.001017837,0.0004674753,0.002659351,0.003488644,0.03817911],"genre_scores_gemma":[0.7012023,0.0008756547,0.2843692,0.0001368667,0.00005986453,0.0001555381,0.000939974,0.0002110435,0.01204964],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002642987,"threshold_uncertainty_score":0.008841693,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01730949826891384,"score_gpt":0.29150069149988,"score_spread":0.2741911932309662,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}