{"id":"W4403036354","doi":"10.1116/6.0003976","title":"Low-loss and low-temperature Al2O3 thin films for integrated photonics and optical coatings","year":2024,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"Mitacs; Ontario Research Foundation","keywords":"Photonics; Materials science; Thin film; Optoelectronics; Engineering physics; Optics; Nanotechnology; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000828551,0.0002576773,0.0004442508,0.0004854577,0.0002122375,0.0004890707,0.0003115484,0.0003325484,0.00002522324],"category_scores_gemma":[0.00009444531,0.000183109,0.00005079059,0.0007185005,0.0007300837,0.0006481747,0.000118346,0.0005186432,0.000001281941],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002570378,"about_ca_system_score_gemma":0.000112339,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000004055599,"about_ca_topic_score_gemma":0.000003710277,"domain_scores_codex":[0.998578,0.00001008502,0.0004606861,0.0003352688,0.0002104635,0.0004054645],"domain_scores_gemma":[0.9992978,0.0001294745,0.0000974689,0.0001466523,0.0001739321,0.0001546542],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002222101,0.00001522846,0.0002975317,0.0002335634,0.00003377499,0.00003727785,0.0003955185,0.0000896858,0.9968007,0.001222582,0.000466459,0.0003854698],"study_design_scores_gemma":[0.0007590377,0.0006102586,0.0006154317,0.0008696484,0.00009271531,0.001522047,0.002716118,0.06966558,0.918043,0.002528797,0.002094205,0.0004831316],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9865035,0.01143749,0.0000889892,0.0006720987,0.0008944282,0.0001688563,0.00004384369,0.0001660239,0.00002471668],"genre_scores_gemma":[0.9904206,0.002296107,0.007126688,0.00005981722,0.00003114556,0.000006948779,0.000001723699,0.00002539182,0.00003157453],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.07875765,"threshold_uncertainty_score":0.7466969,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0065109235603195,"score_gpt":0.2343579922584742,"score_spread":0.2278470686981547,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}