{"id":"W4403242578","doi":"10.3390/mi15101244","title":"Ceramics for Microelectromechanical Systems Applications: A Review","year":2024,"lang":"en","type":"review","venue":"Micromachines","topic":"Electrical and Thermal Properties of Materials","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"École de Technologie Supérieure","funders":"","keywords":"Microelectromechanical systems; Ceramic; Fabrication; Materials science; Silicon nitride; Nanotechnology; Nitride; Substrate (aquarium); Composite material; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004584724,0.0009984851,0.001007726,0.003226187,0.000377966,0.0009854129,0.0007318826,0.0008034364,0.006843019],"category_scores_gemma":[0.0006748514,0.000402607,0.0006468346,0.003201619,0.000302586,0.001362808,0.0006221976,0.001106649,0.00304448],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003713847,"about_ca_system_score_gemma":0.001118308,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001025998,"about_ca_topic_score_gemma":0.001780808,"domain_scores_codex":[0.999781,0.00002322223,0.00003682389,0.00004434681,0.00009493017,0.00001967167],"domain_scores_gemma":[0.9996495,0.0001762196,0.0000546588,0.00001166,0.00008528619,0.00002255327],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0000429685,0.00009053954,0.0002334866,0.04046028,0.00008580274,0.0002355325,0.00009342426,0.0004129896,0.00531366,0.00453169,0.02907066,0.919429],"study_design_scores_gemma":[0.00000542241,0.00007627462,0.0005103368,0.003186317,0.00009848366,0.0007711324,0.00004518604,0.0000722713,0.0009165721,0.0008916556,0.9934104,0.00001591279],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"review","genre_gemma":"review","genre_scores_codex":[0.0002226052,0.9971941,0.0002415478,0.0001191636,0.0002051371,0.000008491876,0.0000382045,0.00001298052,0.001957803],"genre_scores_gemma":[0.0008679772,0.9975753,0.00034948,0.00009571589,0.0001425045,0.000009273922,0.00004707984,0.000002501857,0.0009101672],"genre_candidate":"review","genre_consensus":"review","teacher_disagreement_score":0.006843019,"threshold_uncertainty_score":0.02289224,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02950900116488166,"score_gpt":0.3085465432856539,"score_spread":0.2790375421207723,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}