{"id":"W4403242578","doi":"10.3390/mi15101244","title":"Ceramics for Microelectromechanical Systems Applications: A Review","year":2024,"lang":"en","type":"review","venue":"Micromachines","topic":"Electrical and Thermal Properties of Materials","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"École de Technologie Supérieure","funders":"","keywords":"Microelectromechanical systems; Ceramic; Fabrication; Materials science; Silicon nitride; Nanotechnology; Nitride; Substrate (aquarium); Composite material; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0002188169,0.0005166697,0.001740751,0.00009998483,0.00005038565,0.0001258628,0.0004355276,0.0002602619,0.00001622534],"category_scores_gemma":[0.00001653569,0.0003425354,0.0005423652,0.0002632216,0.00001516952,0.00003464593,0.00005599128,0.0003001421,0.0005219082],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001181502,"about_ca_system_score_gemma":0.00004166392,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000005103776,"about_ca_topic_score_gemma":4.900909e-7,"domain_scores_codex":[0.998393,0.00005188486,0.0007609242,0.0003531416,0.00008145646,0.0003595726],"domain_scores_gemma":[0.999399,0.00008461624,0.0000777329,0.0003368492,0.00003505595,0.00006674288],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[8.834214e-7,0.00001139511,9.329837e-10,0.4477295,0.0002451832,0.00000168949,0.00000119914,0.000001008133,0.0003206628,0.0004622289,0.01738773,0.5338385],"study_design_scores_gemma":[0.00003432508,0.00002919229,8.234226e-10,0.03675156,0.001377705,0.0001126696,1.576276e-7,0.0001575376,0.00001760966,0.0001609299,0.9609767,0.0003816205],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"review","genre_gemma":"review","genre_scores_codex":[3.16535e-7,0.9940762,0.001005993,0.00002216536,0.0005568712,0.003207443,0.0003536996,0.0006156079,0.0001616883],"genre_scores_gemma":[0.000001197262,0.9940403,0.000181051,0.000052101,0.000618416,0.003842275,0.0003633061,0.0002051272,0.0006961944],"genre_candidate":"review","genre_consensus":"review","teacher_disagreement_score":0.943589,"threshold_uncertainty_score":0.9999027,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02950900116488166,"score_gpt":0.3085465432856539,"score_spread":0.2790375421207723,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}