{"id":"W4403311727","doi":"10.1016/j.jmps.2024.105897","title":"Residual stress development in lattice mismatched epitaxial thin films via atomic and molecular layer depositions","year":2024,"lang":"en","type":"article","venue":"Journal of the Mechanics and Physics of Solids","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":13,"is_retracted":false,"has_abstract":false,"ca_institutions":"Okanagan University College; University of British Columbia, Okanagan Campus; University of British Columbia","funders":"Department of Mechanical Engineering, University of Alberta; Alliance de recherche numérique du Canada; Natural Sciences and Engineering Research Council of Canada; University of British Columbia; Institute for Computing, Information and Cognitive Systems","keywords":"Materials science; Residual stress; Lattice (music); Thin film; Condensed matter physics; Epitaxy; Composite material; Layer (electronics); Crystallography; Nanotechnology; Chemistry; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001266629,0.0001898803,0.0002125888,0.0001515779,0.0001769446,0.0003829545,0.000292733,0.0002421149,0.0009986032],"category_scores_gemma":[0.000309879,0.0002212682,0.00007375525,0.0001418738,0.0002255025,0.0002885297,0.0002299766,0.0002417373,0.000142201],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002533674,"about_ca_system_score_gemma":0.000171504,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00103443,"about_ca_topic_score_gemma":0.001893049,"domain_scores_codex":[0.9998915,0.000006639627,0.000006681933,0.00001842304,0.0000542975,0.00002235854],"domain_scores_gemma":[0.9998428,0.00003434216,0.0000542903,0.00001859528,0.00003484557,0.00001529318],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007811207,0.00001167136,0.0003767083,0.0000278291,0.000004936876,0.00006128076,0.00002721268,0.0001892452,0.9980689,0.0001088947,0.00003695719,0.001008235],"study_design_scores_gemma":[0.00002112705,0.0002064381,0.005689355,0.000005687797,0.000009258843,0.00007551743,0.00005888128,0.00453694,0.9887391,0.00003106935,0.000619054,0.000007511144],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9980105,0.0003376035,0.0006531375,0.00003558895,0.00001728463,0.000008101282,0.0000670329,0.00003962994,0.0008312959],"genre_scores_gemma":[0.9983198,0.0001583516,0.0005941971,0.00001053504,0.000006030613,0.000005026469,0.00003619079,0.000009328192,0.0008604625],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00103443,"threshold_uncertainty_score":0.003340721,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01063566706158496,"score_gpt":0.2232077425724502,"score_spread":0.2125720755108652,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}