{"id":"W4403421937","doi":"10.1109/estc60143.2024.10712060","title":"Trench-Based Fully Integrated Capacitors for Power Delivery in Heterogeneous Integration Platforms","year":2024,"lang":"en","type":"article","venue":"","topic":"Supercapacitor Materials and Fabrication","field":"Materials Science","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University","funders":"","keywords":"Capacitor; Trench; Electrical engineering; Power (physics); Computer science; Materials science; Engineering; Voltage; Nanotechnology; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001272101,0.0002694046,0.000194298,0.0001428124,0.000173307,0.0004131345,0.000856213,0.0003211924,0.001401934],"category_scores_gemma":[0.0002874682,0.0001599157,0.0001450273,0.0003208518,0.0001293033,0.0006392338,0.0003248348,0.0002438782,0.000367636],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005428277,"about_ca_system_score_gemma":0.0004144121,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001748323,"about_ca_topic_score_gemma":0.004513125,"domain_scores_codex":[0.9999037,0.000009892004,0.000003398821,0.00002381334,0.00004507554,0.00001409562],"domain_scores_gemma":[0.9999238,0.00001908606,0.00001236646,0.00001666876,0.00002169588,0.000006333498],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001706388,0.0001190551,0.001312725,0.0004182968,0.0001359163,0.0004533959,0.0001467436,0.20925,0.6807567,0.02161947,0.004732385,0.08088464],"study_design_scores_gemma":[0.00001898915,0.000331404,0.001157676,0.00002149669,0.00004028546,0.0001554888,0.0000637139,0.7797359,0.1979553,0.004494245,0.01597551,0.00005005666],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4685447,0.004263457,0.4934957,0.0004188229,0.0002850106,0.0001652295,0.001627323,0.003537074,0.02766274],"genre_scores_gemma":[0.9496466,0.0006415559,0.04618613,0.00005818463,0.00001533266,0.00005252674,0.0001756546,0.00005366045,0.003170468],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001748323,"threshold_uncertainty_score":0.004689932,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01877957801982207,"score_gpt":0.2448896685971009,"score_spread":0.2261100905772788,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}