{"id":"W4403775043","doi":"10.3390/mi15111295","title":"Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications","year":2024,"lang":"en","type":"article","venue":"Micromachines","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"École de Technologie Supérieure; Université du Québec à Montréal","funders":"Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Microelectromechanical systems; Materials science; Switching power; Power (physics); Fast switching; Electrical engineering; Optoelectronics; Engineering; Voltage; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005664775,0.0002073043,0.0001112425,0.00009359512,0.000127129,0.0001633707,0.0001932115,0.0002005287,0.001779991],"category_scores_gemma":[0.00006702184,0.00007688436,0.0001170136,0.0001266386,0.00009654164,0.0001931717,0.0001381595,0.0002083736,0.0004519702],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001288285,"about_ca_system_score_gemma":0.00008980385,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001666757,"about_ca_topic_score_gemma":0.0004428338,"domain_scores_codex":[0.9999543,0.000003287293,0.000002375823,0.00001164136,0.00002063256,0.000007777219],"domain_scores_gemma":[0.9999735,0.000005531561,0.000006609001,0.000004132728,0.000006552443,0.000003733587],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001246438,0.000006723926,0.00006223667,0.00002824973,0.000002743854,0.00003151301,0.000007679872,0.0001076929,0.9957665,0.0001551532,0.000142115,0.003676916],"study_design_scores_gemma":[0.000006614996,0.0001677133,0.001701362,0.000003922254,0.00001181867,0.0001685427,0.00001893317,0.00484083,0.9855927,0.00007707028,0.007403673,0.000006832193],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.935146,0.004211002,0.04456786,0.0002642515,0.0003494086,0.00005623745,0.0003649882,0.0008583782,0.01418197],"genre_scores_gemma":[0.9787912,0.0008086941,0.01441853,0.0000896806,0.0000400881,0.00002475257,0.0001562835,0.00003501589,0.005635624],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001779991,"threshold_uncertainty_score":0.005954683,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00710264615026241,"score_gpt":0.252165884058312,"score_spread":0.2450632379080496,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}