{"id":"W4403863718","doi":"10.1109/ted.2024.3480028","title":"Micromachined Capacitive Sensor With Configured Boundaries: Approach, Design and Fabrication","year":2024,"lang":"en","type":"article","venue":"IEEE Transactions on Electron Devices","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Windsor","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Foundation for Innovation; CMC Microsystems","keywords":"Fabrication; Capacitive sensing; Surface micromachining; Microelectromechanical systems; Electrical engineering; Electronic engineering; Engineering; Materials science; Capacitance; Optoelectronics; Computer science; Physics; Electrode","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00004814591,0.0001815884,0.0001399324,0.0001552528,0.0001676163,0.0001357092,0.00005884421,0.00008796268,0.00000703284],"category_scores_gemma":[0.00000130602,0.0001487007,0.00002628846,0.0002602139,0.0001385324,0.0002025115,2.454059e-7,0.0003022492,0.000007733895],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00007193944,"about_ca_system_score_gemma":0.00003163744,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001724803,"about_ca_topic_score_gemma":0.00003638157,"domain_scores_codex":[0.9993389,0.000009596044,0.000107388,0.0002351407,0.00008464481,0.0002242992],"domain_scores_gemma":[0.999728,0.00007477009,0.00001371836,0.0001238622,0.00002591303,0.00003378321],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001687875,0.00008224257,0.000001741103,0.0004225828,0.0005732328,0.00001600452,0.001820859,0.0823014,0.8552211,0.001025234,0.0002493649,0.05811743],"study_design_scores_gemma":[0.0002545578,0.0003305969,0.00003211744,0.00007648244,0.00008656349,0.00006215396,0.0003401261,0.05229896,0.9389345,0.0002856663,0.00697776,0.0003205116],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.09964838,0.001282535,0.8969087,0.00007372969,0.0001037624,0.0002731053,0.00001372832,0.001257637,0.0004384504],"genre_scores_gemma":[0.9856928,0.0003117108,0.0136055,0.00002030419,0.00001686911,0.000111047,0.000003337838,0.00003914941,0.0001992913],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.8860444,"threshold_uncertainty_score":0.6063837,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008802273623719555,"score_gpt":0.2156498874754477,"score_spread":0.2068476138517281,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}