{"id":"W4403950745","doi":"10.1039/d4tc00612g","title":"Recent advances in plasma etching for micro and nano fabrication of silicon-based materials: a review","year":2024,"lang":"en","type":"review","venue":"Journal of Materials Chemistry C","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":42,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Beijing Municipal Natural Science Foundation; National Natural Science Foundation of China","keywords":"Materials science; Plasma etching; Nano-; Nanotechnology; Etching (microfabrication); Silicon; Plasma; Engineering physics; Optoelectronics; Composite material; Engineering; Nuclear physics; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0009431459,0.0004000862,0.002378444,0.0001088514,0.00001337873,0.00009787368,0.0002550329,0.0002485858,0.0002124056],"category_scores_gemma":[0.0001954833,0.0003053233,0.0001748152,0.0001268723,0.00002811377,0.0001555371,0.00003328883,0.0001248005,0.000002782916],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000118885,"about_ca_system_score_gemma":0.0001379227,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001216284,"about_ca_topic_score_gemma":2.732059e-7,"domain_scores_codex":[0.9972888,0.00007106595,0.002079501,0.000210103,0.0001519134,0.0001985791],"domain_scores_gemma":[0.9983632,0.0001472584,0.001107476,0.0001956563,0.0001263245,0.00006010641],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001596148,0.00001203153,7.13356e-8,0.3470756,0.0000590073,0.000003663562,0.00001038205,0.00000475055,0.6119108,6.770269e-7,0.0003725385,0.04053446],"study_design_scores_gemma":[0.0001568453,0.00001386232,7.441968e-8,0.08776567,0.0004477396,0.00007018843,0.000005081125,0.000001151251,0.4729017,0.00001558938,0.4384487,0.000173392],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"review","genre_gemma":"review","genre_scores_codex":[0.03552385,0.9620625,0.000002209064,0.00001665717,0.00149788,0.0004195959,0.000432898,0.0000227694,0.00002161469],"genre_scores_gemma":[0.0004875786,0.9984964,0.0002819859,0.00001291963,0.0004834904,0.00006200036,0.00009233927,0.00007618807,0.000007104726],"genre_candidate":"review","genre_consensus":"review","teacher_disagreement_score":0.4380762,"threshold_uncertainty_score":0.9999399,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02607052101083328,"score_gpt":0.3066675592580003,"score_spread":0.280597038247167,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}