{"id":"W4404186048","doi":"10.1116/6.0003933","title":"Epitaxial SiGeSn grown on Si by ion implantation","year":2024,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University; Okanagan University College; University of British Columbia, Okanagan Campus; University of British Columbia; Western University","funders":"Natural Sciences and Engineering Research Council of Canada; Tertiary Education Trust Fund; Western University","keywords":"Materials science; Epitaxy; Ion implantation; Optoelectronics; Ion; Nanotechnology; Chemistry; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001230385,0.000324417,0.000236712,0.0001247628,0.0001427308,0.0002752492,0.000254916,0.0001537134,0.0009132666],"category_scores_gemma":[0.0001053912,0.0002731893,0.0001278878,0.0001613535,0.0001542477,0.0002057348,0.0002190837,0.0002130851,0.000384984],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003068317,"about_ca_system_score_gemma":0.0002257495,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001804873,"about_ca_topic_score_gemma":0.005187294,"domain_scores_codex":[0.9999182,0.000004746196,0.000005887176,0.00002292622,0.0000311697,0.00001717717],"domain_scores_gemma":[0.9999236,0.000007639976,0.00002297533,0.00001355877,0.00002224207,0.000009937437],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002928876,0.000005097249,0.000297164,0.00003484128,0.00000382287,0.00002913595,0.00001555323,0.0001721951,0.9986849,0.00008634386,0.00003360343,0.0006080022],"study_design_scores_gemma":[0.000009410326,0.00009950453,0.001848288,0.000004511065,0.000007716849,0.00006014633,0.00001816628,0.001005463,0.9947077,0.00001677762,0.002218743,0.00000367113],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9962483,0.0002638017,0.001547013,0.0000139314,0.00001375539,0.00002261296,0.0002294363,0.00004280799,0.001618335],"genre_scores_gemma":[0.9792295,0.0006082394,0.01180624,0.00001914549,0.000006012854,0.00003724677,0.0007948439,0.00005355724,0.007445092],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001804873,"threshold_uncertainty_score":0.003588736,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007322853888870506,"score_gpt":0.2073362598328448,"score_spread":0.2000134059439743,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}