{"id":"W4405270150","doi":"10.1088/1361-6528/ad9d4b","title":"Editorial for focus on emerging processes and applications of atomic and molecular layer deposition","year":2024,"lang":"en","type":"editorial","venue":"Nanotechnology","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"Basic Energy Sciences","keywords":"Atomic layer deposition; Nanotechnology; Materials science; Layer (electronics); Deposition (geology); Focus (optics); Engineering physics; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006693856,0.0001922992,0.0003151837,0.0002247544,0.00003076086,0.00002657148,0.0001096467,0.001144169,0.000002241724],"category_scores_gemma":[0.0001152114,0.0001839512,0.00002285861,0.0001259522,0.00007008928,0.00003449292,0.00004198835,0.0002411234,0.000002217613],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002788052,"about_ca_system_score_gemma":0.00003518542,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002338771,"about_ca_topic_score_gemma":0.0000133544,"domain_scores_codex":[0.9992215,0.000005483523,0.0002265798,0.000280422,0.000123123,0.0001428852],"domain_scores_gemma":[0.9994704,0.0001837899,0.00006418517,0.00016,0.0001023681,0.00001926384],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"not_applicable","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00002336277,0.000007184836,2.796628e-7,0.002955839,0.00007331545,8.257018e-7,0.0000410104,0.0000100522,0.312646,0.001596656,0.6797808,0.002864642],"study_design_scores_gemma":[0.0002438181,0.0001003366,2.789976e-8,0.0001935894,0.00009349581,0.000001640327,0.000016804,0.00004856681,0.249434,0.0130436,0.7366513,0.0001727903],"study_design_candidate":"not_applicable","study_design_consensus":"not_applicable","genre_codex":"editorial","genre_gemma":"editorial","genre_scores_codex":[0.01692815,0.0075926,0.001646459,0.0000690845,0.9726089,0.0004755156,0.0002451554,0.0003949759,0.00003915162],"genre_scores_gemma":[0.06505828,0.001112162,0.0002700021,0.000003336157,0.9328782,0.0004979465,0.00009121322,0.00008175905,0.000007102666],"genre_candidate":"editorial","genre_consensus":"editorial","teacher_disagreement_score":0.06321202,"threshold_uncertainty_score":0.882488,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004052120320564112,"score_gpt":0.2353472051550715,"score_spread":0.2312950848345074,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}