{"id":"W4405490826","doi":"10.1109/sensors60989.2024.10784820","title":"Characterization of Vibration Sensitivity of One-Port and Two-Port MEMS Microphones","year":2024,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada; University of Ottawa","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Port (circuit theory); Sensitivity (control systems); Microelectromechanical systems; Characterization (materials science); Vibration; Acoustics; Electrical engineering; Computer science; Electronic engineering; Engineering; Materials science; Physics; Optoelectronics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000696603,0.0004485135,0.0003700173,0.0004010908,0.0001515615,0.0004351095,0.0005814745,0.0009196251,0.001931051],"category_scores_gemma":[0.002963308,0.0003169502,0.0002650925,0.0001991696,0.0004851105,0.0005215836,0.0005520133,0.0004439301,0.0004502645],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001540014,"about_ca_system_score_gemma":0.0001312331,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001734877,"about_ca_topic_score_gemma":0.0002364481,"domain_scores_codex":[0.9990181,0.0001024362,0.00005507638,0.0002360233,0.0005087341,0.00007969226],"domain_scores_gemma":[0.9982873,0.0007857776,0.0002140861,0.0001633112,0.000460227,0.00008937636],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007792776,0.00002218056,0.000967644,0.0000848921,0.00001168795,0.0000991393,0.00005731639,0.0003768188,0.9943711,0.0001636033,0.00005175275,0.003716019],"study_design_scores_gemma":[0.00001677363,0.0006619911,0.01669163,0.00001658302,0.00002368723,0.0007023482,0.000113388,0.01292879,0.9667677,0.0001971389,0.001840075,0.00003988593],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9584701,0.001218707,0.03647148,0.0001190296,0.0001388562,0.00008754868,0.00019562,0.0002614137,0.003037283],"genre_scores_gemma":[0.9903898,0.0002602388,0.00807907,0.0000527244,0.00002209226,0.00004837086,0.000100848,0.00002172682,0.001025055],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001931051,"threshold_uncertainty_score":0.006459951,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008883638425898841,"score_gpt":0.2163643386918568,"score_spread":0.2074807002659579,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}