{"id":"W4405527287","doi":"10.1016/j.vacuum.2024.113959","title":"Effects of wet chemical etching on surface band bending and electrical properties of Sn-doped β-Ga2O3 (101) substrate","year":2024,"lang":"en","type":"article","venue":"Vacuum","topic":"Ga2O3 and related materials","field":"Materials Science","cited_by":9,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Calgary","funders":"Natural Science Foundation of Shandong Province; State Key Laboratory of Robotics; National Natural Science Foundation of China; State Key Laboratory of Crystal Materials","keywords":"Substrate (aquarium); Materials science; Doping; Band bending; Etching (microfabrication); Isotropic etching; Bending; Optoelectronics; Dry etching; Chemical engineering; Composite material; Geology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003670009,0.0001590571,0.0003448852,0.00007163844,0.00004476633,0.00008123499,0.0001279364,0.0001317349,0.00005366096],"category_scores_gemma":[0.00006252002,0.0001080611,0.00004894399,0.0001529315,0.00008866328,0.0001159007,0.000050868,0.0001367044,0.00002941706],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002080063,"about_ca_system_score_gemma":0.00004518752,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000420251,"about_ca_topic_score_gemma":5.158422e-7,"domain_scores_codex":[0.9988239,0.0000886678,0.0003283978,0.0002897822,0.000206979,0.0002622772],"domain_scores_gemma":[0.9995487,0.0001594958,0.00007479537,0.0001237777,0.00002804095,0.00006515983],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009475448,0.00004624434,0.00004001215,0.0008339125,0.0000220943,0.0000176419,0.000417704,0.0000144829,0.9978328,0.0005381087,0.00007891858,0.00006329187],"study_design_scores_gemma":[0.0002698098,0.0001461223,0.0002812917,0.0006140548,0.00005129024,0.00001351182,0.00001582636,0.0002342779,0.997918,0.0002802008,0.00004915811,0.0001265087],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9967862,0.002033446,0.00001122268,0.00006852778,0.000522161,0.0002112419,0.000009197146,0.00007461439,0.0002834285],"genre_scores_gemma":[0.9995086,0.0001139943,0.0001444711,0.00001024333,0.00005402767,0.000004839673,0.00000168721,0.00002105416,0.0001410614],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002722461,"threshold_uncertainty_score":0.4406603,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01153168395134255,"score_gpt":0.2240032824583459,"score_spread":0.2124715985070034,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}