{"id":"W4405642454","doi":"10.1117/1.jom.5.1.014001","title":"Design regime of electrostatic actuators for optical microsystems","year":2024,"lang":"en","type":"article","venue":"Journal of Optical Microsystems","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":false,"ca_institutions":"Concordia University","funders":"","keywords":"Microsystem; Actuator; Mechanical engineering; Materials science; Control engineering; Engineering; Computer science; Nanotechnology; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002643724,0.000359461,0.0002726403,0.0002629365,0.0006060214,0.0006318432,0.0005304936,0.0006306184,0.002041497],"category_scores_gemma":[0.0003476854,0.0003009685,0.0001937384,0.0001201471,0.0004829567,0.0007724469,0.0005361118,0.0004989126,0.0006500896],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005489816,"about_ca_system_score_gemma":0.0002576937,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000152779,"about_ca_topic_score_gemma":0.0002591531,"domain_scores_codex":[0.9997949,0.00002260367,0.00001101169,0.00004816109,0.00009764975,0.00002580773],"domain_scores_gemma":[0.9998845,0.00003529635,0.00001842457,0.00001783632,0.00003297089,0.00001084511],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0001133037,0.00004299371,0.0003121617,0.0001667472,0.00001765221,0.00009768777,0.0001289326,0.003397779,0.9331645,0.05188809,0.0007385536,0.009931466],"study_design_scores_gemma":[0.00009312188,0.0004456272,0.002664087,0.0001074134,0.00003719967,0.0007796493,0.0001473375,0.2103156,0.7130873,0.03737154,0.0348752,0.00007597951],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5786785,0.006535983,0.3009688,0.002537072,0.0004642711,0.0002616163,0.0002529076,0.0007003382,0.1096005],"genre_scores_gemma":[0.9550565,0.001179325,0.03367706,0.000263862,0.000106258,0.0002216795,0.00007813832,0.0000571706,0.009360083],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002041497,"threshold_uncertainty_score":0.006829441,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01467112538835109,"score_gpt":0.2554131965977925,"score_spread":0.2407420712094414,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}