{"id":"W4406109230","doi":"10.1016/j.diamond.2025.111950","title":"Fabrication of high aspect ratio diamond tip using reactive ion etching","year":2025,"lang":"en","type":"article","venue":"Diamond and Related Materials","topic":"Diamond and Carbon-based Materials Research","field":"Materials Science","cited_by":5,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Fabrication; Reactive-ion etching; Diamond; Etching (microfabrication); Nanotechnology; Materials science; Aspect ratio (aeronautics); Ion; Optoelectronics; Chemistry; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002164629,0.0002808416,0.00040342,0.0002998652,0.0003037566,0.0003841932,0.0007483399,0.0005141919,0.002092],"category_scores_gemma":[0.000256978,0.0003468667,0.0001979398,0.0002407346,0.0001397362,0.0003416098,0.0003774938,0.0004990087,0.001054439],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002142549,"about_ca_system_score_gemma":0.0002677025,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002536004,"about_ca_topic_score_gemma":0.000707868,"domain_scores_codex":[0.9997844,0.000006615557,0.000009487199,0.00005899227,0.0001160281,0.00002433821],"domain_scores_gemma":[0.9998671,0.00002959126,0.0000186944,0.00002689776,0.00004322148,0.00001445665],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001211534,0.000007927126,0.00006713778,0.00005992912,0.000002663525,0.00008202611,0.00002519882,0.00007180461,0.9931942,0.0004542395,0.0003065252,0.005716241],"study_design_scores_gemma":[0.00001812059,0.00008064676,0.000770648,0.00000372006,0.000004571835,0.0003403937,0.00001986375,0.001987216,0.988432,0.0001856876,0.008145985,0.00001114255],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7239376,0.002798013,0.2391422,0.000623513,0.0007582456,0.0004291766,0.002033274,0.00290738,0.02737063],"genre_scores_gemma":[0.6277003,0.001039169,0.3602257,0.0001380196,0.00004615433,0.0001575112,0.0007616894,0.0001770325,0.009754366],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002092,"threshold_uncertainty_score":0.006998479,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0116124675172685,"score_gpt":0.2706615361314643,"score_spread":0.2590490686141957,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}