{"id":"W4407724804","doi":"10.1117/12.3051250","title":"Probabilistic process window analysis for EUV OPC model validation in advanced DRAM technology","year":2025,"lang":"en","type":"article","venue":"","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Fractal Systems (Canada)","funders":"","keywords":"Dram; Process window; Computer science; Extreme ultraviolet lithography; Reliability engineering; Probabilistic logic; Process (computing); Window (computing); Engineering; Artificial intelligence; Operating system; Computer hardware; Materials science; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001007033,0.0001466287,0.0002477274,0.001203704,0.00003090659,0.00001363518,0.000205656,0.000116409,0.000006874076],"category_scores_gemma":[0.0000731792,0.0001515805,0.000067189,0.002580995,0.00003725166,0.0001677778,0.00002446223,0.0001062196,3.600546e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001028699,"about_ca_system_score_gemma":0.00002020911,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001968151,"about_ca_topic_score_gemma":0.00003516715,"domain_scores_codex":[0.999127,0.000005371966,0.0002952065,0.0002598134,0.000076139,0.000236475],"domain_scores_gemma":[0.9995359,0.00003423938,0.00002966141,0.0002940731,0.00008922583,0.00001689014],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00001298156,0.00004585597,0.005916721,0.0001844346,0.0001264113,2.921224e-7,0.00003366347,0.9691138,0.002019596,0.01632028,0.00001903456,0.006206919],"study_design_scores_gemma":[0.00030516,0.00002023392,0.0002645412,0.00003526207,0.0001006935,1.445584e-7,0.00005712017,0.7599221,0.0701642,0.1688506,0.000112435,0.0001675895],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.1184084,0.0000617453,0.8753461,0.00004852567,0.00003414416,0.00099685,0.00001093718,0.001028595,0.004064661],"genre_scores_gemma":[0.8782668,0.00001698366,0.1200011,0.00002076809,0.00000258497,0.001511393,0.00002224452,0.00001586823,0.0001422967],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.7598584,"threshold_uncertainty_score":0.6181273,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007547564635790278,"score_gpt":0.2975737795067262,"score_spread":0.2900262148709359,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}