{"id":"W4407742492","doi":"10.1103/prxenergy.4.017002","title":"Spatial Atomic Layer Deposition for Energy and Electronic Devices","year":2025,"lang":"en","type":"article","venue":"PRX Energy","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":19,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Engineering and Physical Sciences Research Council; Association Neurofibromatoses et Recklinghause; Agence Nationale de la Recherche; UK Research and Innovation","keywords":"Atomic layer deposition; Deposition (geology); Layer (electronics); Materials science; Layer by layer; Energy (signal processing); Nanotechnology; Optoelectronics; Physics; Geology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00003277811,0.0001021019,0.0001211072,0.00006015764,0.00004178872,0.00004936943,0.0000579265,0.000064729,0.00001915501],"category_scores_gemma":[0.000003309656,0.00009938357,0.00002578961,0.00005135227,0.000008837897,0.00007920261,0.00001682806,0.00001862993,6.702934e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003575817,"about_ca_system_score_gemma":0.00001720946,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000653594,"about_ca_topic_score_gemma":0.00190015,"domain_scores_codex":[0.9995075,0.000009925078,0.0001203466,0.0001296736,0.00003646666,0.0001960301],"domain_scores_gemma":[0.9998238,0.00003591045,0.00001657056,0.00008221434,0.00001709036,0.00002443003],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004898689,0.00001647614,0.0003638175,0.0002050378,0.0001453929,0.000001035014,0.00003982103,0.0007320071,0.8469924,0.1149271,0.001451781,0.03507613],"study_design_scores_gemma":[0.0004351246,0.00003387027,0.0004998812,0.00003746426,0.00004230039,0.000004169281,0.00001217286,0.03019802,0.8138862,0.007595393,0.1470547,0.0002007612],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9537107,0.005577987,0.03798911,0.00005495088,0.0005655616,0.00004611806,0.000008291082,0.0002036751,0.001843662],"genre_scores_gemma":[0.9988122,0.0003702236,0.0001617165,0.0002693448,0.0001476652,0.00006157284,0.0000291872,0.00001756809,0.0001305337],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1456029,"threshold_uncertainty_score":0.4052745,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005238606286084252,"score_gpt":0.2062714705554835,"score_spread":0.2010328642693993,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}