{"id":"W4408291382","doi":"10.3390/electronics14061091","title":"Investigation of Source/Drain Height Variation and Its Impacts on FinFET and GAA Nanosheet FET","year":2025,"lang":"en","type":"article","venue":"Electronics","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"National Key Research and Development Program of China","keywords":"Nanosheet; Variation (astronomy); Materials science; Electronic engineering; Optoelectronics; Engineering; Physics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001220243,0.0001082908,0.0001490282,0.0001495676,0.00004125659,0.00002598572,0.00004229683,0.00009773223,0.00001698836],"category_scores_gemma":[0.00004386037,0.000100269,0.00002340938,0.0002480668,0.00001321777,0.00008436566,0.000006557402,0.0001585142,0.000002150672],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00006856135,"about_ca_system_score_gemma":0.00004315363,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000009756295,"about_ca_topic_score_gemma":0.00005982961,"domain_scores_codex":[0.9994568,0.00002360334,0.0001580907,0.0001191191,0.00007379761,0.0001685799],"domain_scores_gemma":[0.999755,0.0000367508,0.0000334471,0.00009266267,0.00004612876,0.00003597823],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009838144,0.00001022623,0.0006238348,0.0001450343,0.0002999414,7.492295e-7,0.0018667,0.002679018,0.9507704,0.0356797,0.002553865,0.005360741],"study_design_scores_gemma":[0.001074419,0.0003565587,0.01162682,0.0002473041,0.000323827,0.000007438747,0.0001252376,0.154101,0.8020851,0.01136048,0.01815637,0.0005353905],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9925817,0.005423074,0.0005340397,0.0001947559,0.0000454693,0.000080923,0.000006071018,0.00004724292,0.00108667],"genre_scores_gemma":[0.9983862,0.001166805,0.00002518708,0.0001069955,0.00001840118,0.000003560437,0.00002427767,0.00001024425,0.00025834],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.151422,"threshold_uncertainty_score":0.4088851,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005660491729072454,"score_gpt":0.1924239048142751,"score_spread":0.1867634130852026,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}