{"id":"W4408610127","doi":"10.1109/mems61431.2025.10918197","title":"Geometrically Modified Silicon Resonators With Sub-PPM Linear Temperature Coefficient Of Frequency","year":2025,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Temperature coefficient; Resonator; Silicon; Materials science; Temperature measurement; Coupling coefficient of resonators; Optoelectronics; Acoustics; Composite material; Physics; Thermodynamics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002311875,0.0006025364,0.0004327928,0.0002121182,0.0001823338,0.0003337382,0.0009552367,0.0005256577,0.000960912],"category_scores_gemma":[0.0005765249,0.0002531368,0.0005298223,0.000153834,0.0004914728,0.0005823899,0.0003327581,0.0007101711,0.0005842502],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003950632,"about_ca_system_score_gemma":0.0001763626,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002109335,"about_ca_topic_score_gemma":0.0006946036,"domain_scores_codex":[0.999526,0.00005296194,0.00002584667,0.0001382905,0.0002133125,0.00004357046],"domain_scores_gemma":[0.9995061,0.0001120029,0.0001756876,0.00008778514,0.00009757622,0.00002079282],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001824948,0.00001088438,0.00005728068,0.00003532873,0.000004432862,0.00002104828,0.00002234441,0.0001800854,0.9981388,0.0002829272,0.00003221808,0.001196433],"study_design_scores_gemma":[0.000007100969,0.0002158842,0.0005161082,0.000002728303,0.0000132651,0.0001236111,0.000009300008,0.001650461,0.9958437,0.00005374796,0.0015528,0.00001125983],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9109169,0.002023965,0.07911499,0.0003751613,0.0003540537,0.0001025453,0.0001618535,0.0005520401,0.006398595],"genre_scores_gemma":[0.920269,0.0005524009,0.07414092,0.0001356026,0.0001118687,0.00005698955,0.0001583931,0.000122535,0.004452199],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.000960912,"threshold_uncertainty_score":0.003214598,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005369491456696503,"score_gpt":0.2127161563553208,"score_spread":0.2073466648986243,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}