{"id":"W4408912341","doi":"10.9734/bpi/mono/978-93-49473-93-5/ch21","title":"Effect of HF Wave Frequency on N-atom Production in N2 HF Plasmas and Its Application in CN Thin Films Deposition","year":2025,"lang":"en","type":"book-chapter","venue":"","topic":"Plasma Diagnostics and Applications","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"","keywords":"Plasma; Deposition (geology); Atom (system on chip); Atomic physics; Materials science; Chemistry; Physics; Nuclear physics; Engineering; Geology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001979185,0.0001945343,0.0001223602,0.0001280238,0.0001746979,0.0002195452,0.0001649617,0.0002443257,0.001027391],"category_scores_gemma":[0.0002932627,0.0001509353,0.0001257162,0.000140382,0.0001785855,0.0001823181,0.0001219001,0.0001533761,0.000136332],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002614454,"about_ca_system_score_gemma":0.0001033255,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001551891,"about_ca_topic_score_gemma":0.001545005,"domain_scores_codex":[0.9998932,0.00001650806,0.00000469175,0.00002969958,0.00003186385,0.00002407571],"domain_scores_gemma":[0.9998409,0.000096708,0.0000249715,0.000008336023,0.00001981882,0.000009232822],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001789526,0.00001171761,0.0006281745,0.00007211545,0.000005935475,0.00006826666,0.00006202107,0.0002930622,0.9959424,0.00006308223,0.00004680283,0.00262736],"study_design_scores_gemma":[0.00000642177,0.0001782515,0.00357378,0.000005488997,0.000008097079,0.00004529326,0.0000354735,0.0006672746,0.9947301,0.00001684757,0.0007285061,0.000004379492],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.995998,0.0009737554,0.0009348832,0.0000376116,0.00001105918,0.00001007352,0.00007797312,0.00001908426,0.001937459],"genre_scores_gemma":[0.9975218,0.0006532863,0.0008886448,0.00001512185,0.000007947776,0.000008039422,0.00004805599,0.00001047795,0.0008465961],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001551891,"threshold_uncertainty_score":0.003437042,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005908570944549792,"score_gpt":0.2021220973637294,"score_spread":0.1962135264191796,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}