{"id":"W4409110827","doi":"10.3390/mi16040427","title":"The Influence of Thermal Annealing on the Chemical Composition, Nanomechanical, and Nanotribological Properties of Tantalum Thin Films","year":2025,"lang":"en","type":"article","venue":"Micromachines","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada; Indian Institute of Technology Delhi; University of Waterloo","keywords":"Nanoindentation; Materials science; X-ray photoelectron spectroscopy; Annealing (glass); Thin film; Composite material; Tribology; Tantalum; Elastic modulus; Nanotribology; Oxide; Nanoscopic scale; Nanotechnology; Metallurgy; Chemical engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001228856,0.000254311,0.0001700638,0.0001702481,0.0001661546,0.0002284463,0.0001976292,0.0001913829,0.0008092437],"category_scores_gemma":[0.0004650011,0.0002220771,0.0001430559,0.0001682759,0.0001795043,0.0002276362,0.00009751043,0.0002953621,0.0001659584],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001674012,"about_ca_system_score_gemma":0.0001029313,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001148935,"about_ca_topic_score_gemma":0.001730178,"domain_scores_codex":[0.9998857,0.000009204575,0.00001011353,0.00002991825,0.00004358888,0.00002145077],"domain_scores_gemma":[0.9998306,0.0000442841,0.00004428579,0.00002026913,0.00005068436,0.00000980989],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003171879,0.000006214992,0.000462442,0.00004880919,0.000009108193,0.00004383606,0.00003890551,0.0001330899,0.9978932,0.00003863446,0.00002633485,0.001267642],"study_design_scores_gemma":[0.000003898615,0.0000949067,0.01173101,0.000007748235,0.00003033024,0.00008837054,0.00006109356,0.001557978,0.9854264,0.00002139665,0.0009697533,0.000007216036],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9967448,0.001069453,0.001257263,0.00003610851,0.00002389018,0.000008619259,0.0001173987,0.00003249321,0.0007100745],"genre_scores_gemma":[0.9976356,0.0004618365,0.001167409,0.00001797506,0.000004962398,0.00001324187,0.00009920785,0.0000207892,0.0005789002],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001148935,"threshold_uncertainty_score":0.002707243,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008678139085468996,"score_gpt":0.1931044780079414,"score_spread":0.1844263389224725,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}