{"id":"W4409490414","doi":"10.1088/2515-7647/adcddc","title":"Low-temperature fabrication of plasmonic titanium nitride thin films by electron beam evaporation","year":2025,"lang":"en","type":"article","venue":"Journal of Physics Photonics","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"H2020 European Research Council; Engineering and Physical Sciences Research Council; Leverhulme Trust","keywords":"Fabrication; Materials science; Electron beam physical vapor deposition; Plasmon; Evaporation; Optoelectronics; Thin film; Cathode ray; Nitride; Titanium nitride; Titanium; Nanotechnology; Electron; Metallurgy; Layer (electronics); Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002493324,0.0001657543,0.0003644772,0.00006501104,0.00006362266,0.00006208987,0.0002270315,0.00007208437,0.00007325289],"category_scores_gemma":[0.0000105899,0.0001479712,0.0001835964,0.0002635853,0.00002567931,0.0002836302,0.00002285426,0.0002925527,0.000004185381],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005909532,"about_ca_system_score_gemma":0.0003135673,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004703692,"about_ca_topic_score_gemma":0.000001116594,"domain_scores_codex":[0.9988432,0.00004544357,0.0005642444,0.0001363575,0.0002321382,0.0001786104],"domain_scores_gemma":[0.9983966,0.00004904057,0.0008271021,0.0002041905,0.0004745355,0.00004854092],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005205167,0.0002178375,0.000203688,0.00005157514,0.0001298886,2.963151e-7,0.000087623,0.0008439326,0.9875028,0.002811942,0.007836118,0.0002622046],"study_design_scores_gemma":[0.0005660533,0.0001196113,0.00008236452,0.0001079269,0.0001058018,5.888689e-7,0.0001446484,0.0002999582,0.9921099,0.005358886,0.0009882278,0.0001160411],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9979549,0.0002381768,0.0005317006,0.00006252734,0.000509152,0.0001592078,0.00009050633,0.000006985334,0.0004468624],"genre_scores_gemma":[0.9991259,0.00004411882,0.0002584706,0.0000761909,0.0001613137,0.00000470844,0.0001037849,0.00001612857,0.0002093737],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.006847891,"threshold_uncertainty_score":0.603409,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004971508646838767,"score_gpt":0.2377027935595217,"score_spread":0.232731284912683,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}