{"id":"W4410507120","doi":"10.1088/2053-1583/adda02","title":"Rapid nucleation of ZnO on MoS<sub>2</sub> and WS<sub>2</sub> using an atmospheric-pressure spatial atomic layer deposition system","year":2025,"lang":"en","type":"article","venue":"2D Materials","topic":"2D Materials and Applications","field":"Materials Science","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; University of Waterloo","funders":"Deutsche Forschungsgemeinschaft","keywords":"Atomic layer deposition; Nucleation; Layer (electronics); Materials science; Deposition (geology); Atmospheric pressure; Nanotechnology; Meteorology; Physics; Thermodynamics; Geology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0006953277,0.0003651909,0.0006823436,0.00006132247,0.0003524543,0.0003688015,0.0002823372,0.0002632385,0.0001075463],"category_scores_gemma":[0.00003703138,0.0003519,0.00006598456,0.0001970585,0.0001281887,0.0004126095,0.000165466,0.00006334326,0.00007428567],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001073611,"about_ca_system_score_gemma":0.00008761884,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003814983,"about_ca_topic_score_gemma":0.00002372716,"domain_scores_codex":[0.9973543,0.0003824179,0.000864372,0.0006827202,0.0003099359,0.0004062082],"domain_scores_gemma":[0.9985119,0.00006744878,0.000509574,0.0006297913,0.0001655176,0.0001157592],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002553023,0.0001313394,0.00002386583,0.0005248819,0.00002582157,0.00000241152,0.0001102496,0.0003241643,0.9942038,0.003175608,0.0001272153,0.001095336],"study_design_scores_gemma":[0.0006301258,0.0001299518,0.00172562,0.0004052934,0.0001842114,0.00001566607,0.00009466958,0.001267739,0.9947725,0.0003555681,0.0001031791,0.0003154753],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9936832,0.0000938524,0.00325107,0.00006908036,0.001272879,0.0008999584,0.000378323,0.0002315849,0.0001200188],"genre_scores_gemma":[0.9975204,0.00005480822,0.001725895,0.0001233045,0.0003109773,0.0001191061,0.00008129835,0.00005817833,0.00000603406],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003837165,"threshold_uncertainty_score":0.9998933,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01333357422395614,"score_gpt":0.2398651110010004,"score_spread":0.2265315367770443,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}