{"id":"W4410507120","doi":"10.1088/2053-1583/adda02","title":"Rapid nucleation of ZnO on MoS<sub>2</sub> and WS<sub>2</sub> using an atmospheric-pressure spatial atomic layer deposition system","year":2025,"lang":"en","type":"article","venue":"2D Materials","topic":"2D Materials and Applications","field":"Materials Science","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; University of Waterloo","funders":"Deutsche Forschungsgemeinschaft","keywords":"Atomic layer deposition; Nucleation; Layer (electronics); Materials science; Deposition (geology); Atmospheric pressure; Nanotechnology; Meteorology; Physics; Thermodynamics; Geology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007222051,0.0002536028,0.0001624442,0.0001203121,0.0000987743,0.0002379384,0.0002282169,0.0001554684,0.0005672884],"category_scores_gemma":[0.0001461007,0.0002081306,0.000151691,0.00009443352,0.0001409782,0.0001559944,0.0002156574,0.0001990077,0.0001202094],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002326584,"about_ca_system_score_gemma":0.0001191256,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001373361,"about_ca_topic_score_gemma":0.002875709,"domain_scores_codex":[0.9999268,0.000004366796,0.000003969364,0.00001842611,0.00003458476,0.00001188266],"domain_scores_gemma":[0.9999379,0.00001708903,0.00001654977,0.000008560962,0.0000126,0.000007306284],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001039061,0.000001929459,0.0001336557,0.00001403464,0.00000166021,0.00002073497,0.000006048792,0.00006053551,0.9992982,0.00002972568,0.00001219751,0.0004108521],"study_design_scores_gemma":[0.000005262911,0.00004487738,0.002070408,0.000001629287,0.000003819476,0.00005270181,0.00001052021,0.002185983,0.995168,0.00001200999,0.0004424493,0.000002512681],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9962156,0.0003158801,0.002296947,0.0000196418,0.00001537046,0.00001156677,0.00009608243,0.00006620801,0.0009628222],"genre_scores_gemma":[0.9960573,0.0002342748,0.003050462,0.000008393062,0.00000514345,0.000009975424,0.00006411346,0.00001317526,0.000557246],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001373361,"threshold_uncertainty_score":0.002730727,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01333357422395614,"score_gpt":0.2398651110010004,"score_spread":0.2265315367770443,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}