{"id":"W4412477496","doi":"10.1016/j.optlastec.2025.113567","title":"Study on surface modification of 4H-SiC wafers induced by nanosecond laser","year":2025,"lang":"en","type":"article","venue":"Optics & Laser Technology","topic":"Diamond and Carbon-based Materials Research","field":"Materials Science","cited_by":2,"is_retracted":false,"has_abstract":false,"ca_institutions":"MD Precision (Canada)","funders":"National Key Research and Development Program of China; National Science and Technology Major Project; National Natural Science Foundation of China","keywords":"Wafer; Nanosecond; Materials science; Laser; Surface modification; Optoelectronics; Surface (topology); Nanotechnology; Optics; Mechanical engineering; Engineering; Physics; Mathematics; Geometry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004591433,0.0001846503,0.0003369562,0.0002899406,0.00009137398,0.00005526719,0.0005973889,0.0002627236,0.000111577],"category_scores_gemma":[0.0001501368,0.0001709686,0.00003686217,0.0005927689,0.0001955179,0.0000721926,0.0001803666,0.0001904124,0.0001329069],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00006717302,"about_ca_system_score_gemma":0.0001263759,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00005597062,"about_ca_topic_score_gemma":0.00001988637,"domain_scores_codex":[0.9984142,0.0001032946,0.0003744351,0.0004541451,0.000273759,0.0003801901],"domain_scores_gemma":[0.9988277,0.0001016446,0.0001214331,0.0007461045,0.0001552544,0.00004787701],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006987301,0.0006079079,0.0004024085,0.00003053707,0.00001972689,0.000005957276,0.0000526044,0.0001145617,0.9945381,0.002705918,0.0008130011,0.0006393777],"study_design_scores_gemma":[0.0007264568,0.0004844031,0.0002239806,0.00002855433,0.00002208838,4.080324e-7,0.0007599911,0.00006438602,0.9958291,0.001414293,0.0003040918,0.0001422218],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9952382,0.00003544393,0.00002961397,0.000743184,0.0003388982,0.0004982963,0.00008975495,0.000155125,0.002871445],"genre_scores_gemma":[0.9987484,0.00001316963,0.0002386192,0.00007412177,0.00000972918,0.00006500616,0.00001864706,0.00001950764,0.0008128111],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003510149,"threshold_uncertainty_score":0.6971896,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02043495509893884,"score_gpt":0.3040446374794482,"score_spread":0.2836096823805093,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}