{"id":"W4412524031","doi":"10.31438/trf.hh2024.94","title":"DEMONSTRATION OF FABRY-PEROT INTERFEROMETRY FOR PHOTOLITHOGRAPHY MASKS","year":2024,"lang":"en","type":"article","venue":"","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Mitacs","keywords":"Photolithography; Interferometry; Fabry–Pérot interferometer; Computational lithography; Optoelectronics; Optics; Materials science; Computer science; Nanotechnology; Physics; Resist; Multiple patterning","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001087862,0.0001364047,0.0001461151,0.0004342055,0.00001303109,0.00002714388,0.0001229702,0.00007485162,0.00007129898],"category_scores_gemma":[0.000005904461,0.0001277684,0.0001487843,0.0004947241,0.00004681856,0.0001794835,0.0000141739,0.00009321374,0.00000200502],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001987401,"about_ca_system_score_gemma":0.000005933309,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003548481,"about_ca_topic_score_gemma":0.000001658002,"domain_scores_codex":[0.9992904,0.000005798609,0.0002714633,0.0001610556,0.00009911019,0.0001721669],"domain_scores_gemma":[0.9996778,0.00005143699,0.0000144437,0.000186608,0.00003531631,0.00003441299],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004811659,0.000109482,0.003875795,0.003145934,0.0008465353,0.000007071812,0.000404138,0.0002305749,0.1345129,0.1752483,0.01111309,0.670458],"study_design_scores_gemma":[0.000313572,0.0003614559,0.0002523211,0.0004290621,0.0001161986,0.00001902601,0.0001767074,0.1382602,0.7934238,0.03157706,0.03444838,0.0006221822],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.01430887,0.0008098395,0.9569547,0.000008983654,0.0003488308,0.0004487357,0.0000522164,0.001309844,0.02575798],"genre_scores_gemma":[0.9206637,0.00008876524,0.07887224,0.00001292777,0.00002920482,0.0002034088,0.00001314725,0.00003631086,0.00008033893],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.9063548,"threshold_uncertainty_score":0.5210242,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009574782125813546,"score_gpt":0.2656560316838711,"score_spread":0.2560812495580576,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}