{"id":"W4412524169","doi":"10.31438/trf.hh2024.111","title":"CONDUCTIVE DIRECT BONDING OF IN-SITU DOPED POLYSILICON FOR MEMS WAFER-LEVEL PACKAGING","year":2024,"lang":"en","type":"article","venue":"","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Electrical conductor; Microelectromechanical systems; Wafer; Wafer bonding; Optoelectronics; Doping; Die preparation; Wire bonding; In situ; Electronic engineering; Electrical engineering; Composite material; Engineering; Wafer dicing; Chemistry","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008414315,0.0004179034,0.0001497541,0.0001084257,0.0002049129,0.0002424137,0.0002589589,0.0003184765,0.001467231],"category_scores_gemma":[0.0001378526,0.0002082859,0.0001042028,0.00008001487,0.0002316016,0.0003007838,0.0003110357,0.000323533,0.0003787022],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001599984,"about_ca_system_score_gemma":0.0001161448,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001374225,"about_ca_topic_score_gemma":0.0004539958,"domain_scores_codex":[0.9999015,0.00001443484,0.000004871957,0.00002233334,0.00004024001,0.00001651899],"domain_scores_gemma":[0.9999366,0.0000186014,0.00001604151,0.0000109994,0.0000100282,0.000007703434],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000008955343,0.000005101501,0.00004633522,0.00003627215,0.000002667509,0.00005212058,0.00002454767,0.0000647685,0.9977484,0.000220334,0.0000730609,0.001717494],"study_design_scores_gemma":[0.000003589817,0.00009570597,0.0006075273,0.000004130184,0.00000642894,0.0001602692,0.00002268112,0.0008575105,0.9953167,0.00008601671,0.002835934,0.000003574738],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9609611,0.001584002,0.0282601,0.0002251013,0.0002027337,0.000066908,0.000134265,0.0001619372,0.008403817],"genre_scores_gemma":[0.9768445,0.0009983438,0.01827172,0.00005834778,0.00003911219,0.00003521194,0.0000785147,0.00004181656,0.003632442],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001467231,"threshold_uncertainty_score":0.004908383,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03548111213596963,"score_gpt":0.2616756356644787,"score_spread":0.2261945235285091,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}