{"id":"W4412803770","doi":"10.1109/pn66844.2025.11097183","title":"Investigating Residual Stress and Cracking Limits in Thick Silicon Nitride for Scalable Photonic Integrated Circuits","year":2025,"lang":"en","type":"article","venue":"","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Foundation for Innovation","keywords":"Materials science; Residual stress; Cracking; Silicon nitride; Residual; Electronic circuit; Photonics; Photonic integrated circuit; Stress (linguistics); Nitride; Scalability; Optoelectronics; Silicon; Electronic engineering; Composite material; Computer science; Electrical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000220717,0.0002823394,0.0001727273,0.0002057542,0.0002107942,0.0003737173,0.0004277462,0.0004066932,0.0008403439],"category_scores_gemma":[0.0007162952,0.0002123856,0.0001152528,0.0001238406,0.0004684546,0.0007180776,0.0003658297,0.0003909712,0.0001475143],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004475634,"about_ca_system_score_gemma":0.0003396217,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001516622,"about_ca_topic_score_gemma":0.002453147,"domain_scores_codex":[0.9999158,0.000006645471,0.000003642547,0.00001465834,0.00004144304,0.00001767847],"domain_scores_gemma":[0.999772,0.00008798805,0.0000524311,0.00002122248,0.00004551732,0.00002086894],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003789289,0.0002129003,0.008184501,0.0003895524,0.0000577751,0.0004375511,0.0002288085,0.1928392,0.775682,0.009871343,0.0009069276,0.0108104],"study_design_scores_gemma":[0.0000298304,0.0004219612,0.004358459,0.00002826533,0.00002183463,0.00005950803,0.0001306308,0.8627353,0.1282306,0.003026435,0.0009304805,0.00002679806],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9916447,0.0006360136,0.004575164,0.000154736,0.00002206892,0.00001499079,0.00009850015,0.00007823552,0.0027755],"genre_scores_gemma":[0.9985883,0.0001981996,0.0009549545,0.00001303723,0.000005560023,0.00000990398,0.00004697486,0.00001399418,0.0001689887],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001516622,"threshold_uncertainty_score":0.003247261,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02348243566713766,"score_gpt":0.2743930501962261,"score_spread":0.2509106145290884,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}