{"id":"W4413257205","doi":"10.1021/acsami.5c10265","title":"Damage-Free Vertical Microfabrication of α-Quartz via HF Gas-Phase Catalyst Etching","year":2025,"lang":"en","type":"article","venue":"ACS Applied Materials & Interfaces","topic":"Acoustic Wave Resonator Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institute of Aging","funders":"Adaptable and Seamless Technology Transfer Program through Target-Driven R and D; Waseda University","keywords":"Materials science; Quartz; Etching (microfabrication); Microfabrication; Reactive-ion etching; Microstructure; Crystal (programming language); Isotropic etching; Crystallinity; Photoresist; Nanotechnology; Chemical engineering; Optoelectronics; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001949476,0.0002371882,0.0003987215,0.0001855013,0.00004746981,0.0000634791,0.0006549884,0.0001934845,0.00006792203],"category_scores_gemma":[0.000100426,0.0002311605,0.00001714406,0.0002021356,0.000140041,0.00008680965,0.0003015796,0.00013966,0.00006074054],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008733685,"about_ca_system_score_gemma":0.00001633014,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003465804,"about_ca_topic_score_gemma":0.000003528044,"domain_scores_codex":[0.998775,0.00001748732,0.0005205046,0.0002558678,0.0001425139,0.0002886298],"domain_scores_gemma":[0.9990963,0.00009781424,0.00006135118,0.0006766988,0.00004150071,0.00002638989],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000413793,0.00004766303,0.000006156261,0.0002768624,0.00008518405,0.00000196047,0.0001306125,0.0002680529,0.9901216,0.001822464,0.001812233,0.005385845],"study_design_scores_gemma":[0.0005435824,0.00002853149,0.00006066665,0.00008088015,0.00006496193,0.000002211311,0.0002568184,0.0001744372,0.9951199,0.003304591,0.0001790536,0.0001843468],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9873691,0.0003363925,0.009372206,0.0001342612,0.0003646151,0.000283768,0.00006886221,0.0006241867,0.001446583],"genre_scores_gemma":[0.9985566,0.00006205659,0.001175415,0.00002172037,0.00002964055,0.00006538774,0.00002744507,0.00003545091,0.00002630037],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01118746,"threshold_uncertainty_score":0.9426451,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006075021614096772,"score_gpt":0.2398904913645586,"score_spread":0.2338154697504618,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}