{"id":"W4414116781","doi":"10.1109/jsen.2025.3606804","title":"Tunable Negative-Stiffness Nonlinear Microspring Design for High-Performance MEMS Inertial Sensors","year":2025,"lang":"en","type":"article","venue":"IEEE Sensors Journal","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"Canadian Space Agency; CMC Microsystems","keywords":"Proof mass; Nonlinear system; Stiffness; Microelectromechanical systems; Capacitive sensing; Finite element method; Accelerometer; Microfabrication; Displacement (psychology)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003175945,0.0006300398,0.0002293604,0.0001985019,0.0001941063,0.0001864372,0.0007701977,0.0004800025,0.000743525],"category_scores_gemma":[0.000329538,0.0002488619,0.0002093443,0.0001433108,0.0003352229,0.0004681922,0.0003129313,0.0002765679,0.0004378778],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005595677,"about_ca_system_score_gemma":0.0004280976,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005263017,"about_ca_topic_score_gemma":0.001777141,"domain_scores_codex":[0.999747,0.00002898025,0.00001496411,0.0000615858,0.0001237036,0.0000236859],"domain_scores_gemma":[0.9996841,0.00005434741,0.0001189897,0.00002928517,0.00008114787,0.00003223403],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001823641,0.00001541373,0.0001004955,0.00006403014,0.00000314305,0.00003203332,0.00002486088,0.000622011,0.995131,0.0004937294,0.00008206287,0.00341303],"study_design_scores_gemma":[0.0000446483,0.0005380751,0.001624009,0.000009589724,0.00001963357,0.0003946048,0.00002070322,0.03655493,0.9535688,0.0002997824,0.006881354,0.00004395043],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.661483,0.002237537,0.3291631,0.0003835073,0.000129304,0.0002518822,0.0001891772,0.0008081408,0.005354181],"genre_scores_gemma":[0.7789064,0.00045187,0.2171165,0.0001098049,0.00003588479,0.0001795219,0.00009381122,0.00004797037,0.003058226],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0007701977,"threshold_uncertainty_score":0.00405997,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01498359571693086,"score_gpt":0.2423321262986393,"score_spread":0.2273485305817084,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}