{"id":"W4414827659","doi":"10.1016/j.pes.2025.100154","title":"Advances in etching of 2D nanomaterials: Research challenges and advanced devices","year":2025,"lang":"en","type":"article","venue":"Progress in Engineering Science","topic":"2D Materials and Applications","field":"Materials Science","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Etching (microfabrication); Process (computing); Troubleshooting","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.002444845,0.00009231894,0.0001943965,0.0004425739,0.00007345976,0.00008043595,0.0004564697,0.00003410338,0.000004819667],"category_scores_gemma":[0.0002101499,0.00008437866,0.000007593235,0.0007220965,0.0004415398,0.0005860457,0.0002372503,0.00007243108,0.000001579746],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000453642,"about_ca_system_score_gemma":0.00007048146,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000006347376,"about_ca_topic_score_gemma":0.00002700827,"domain_scores_codex":[0.9986699,0.00003927198,0.0002899907,0.0003738568,0.0002569035,0.0003700641],"domain_scores_gemma":[0.9994731,0.0001493875,0.00005104035,0.0002159204,0.00007506352,0.00003546394],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001510695,0.00005932279,0.00190779,0.0006991094,4.89638e-7,0.000002350685,0.001097452,0.001170875,0.8883548,0.03284582,2.812987e-7,0.0738466],"study_design_scores_gemma":[0.0003623649,0.00004978021,0.05832761,0.001318051,0.000001881161,0.000002805179,0.0006546843,0.001710159,0.933277,0.00316178,0.0009271178,0.0002067783],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9695205,0.02932874,0.00007040012,0.0001448902,0.0002496453,0.000224267,0.000002365238,0.00003747566,0.000421717],"genre_scores_gemma":[0.9912412,0.002139759,0.006434108,0.000002694858,0.00001295668,0.0001608519,2.152683e-7,0.000005457513,0.000002792309],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.07363982,"threshold_uncertainty_score":0.3440862,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02743980245412246,"score_gpt":0.3666681617574591,"score_spread":0.3392283593033366,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}