{"id":"W4415371877","doi":"10.1038/s41378-025-00986-4","title":"Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging","year":2025,"lang":"en","type":"article","venue":"Microsystems & Nanoengineering","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Ontario Ministry of Research and Innovation; Industry Canada","keywords":"Fabrication; Microscale chemistry; Nanoscopic scale; Atomic force microscopy; Silicon; Characterization (materials science); Etching (microfabrication); Microscope; Limiting","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001680058,0.0002775642,0.0003909563,0.0001692609,0.0001823129,0.0001053447,0.0003024357,0.00005279997,0.00001339599],"category_scores_gemma":[0.00000546768,0.0002549381,0.0001095558,0.0003783977,0.0000443026,0.0001587593,0.00004636709,0.000107128,0.000003586854],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008379423,"about_ca_system_score_gemma":0.0000806099,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004125163,"about_ca_topic_score_gemma":0.000006300244,"domain_scores_codex":[0.9986188,0.00001286575,0.0005133567,0.0004022741,0.00009719635,0.0003554995],"domain_scores_gemma":[0.9990157,0.00007821049,0.0002115379,0.0004129643,0.0002350579,0.00004647398],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002982671,0.00005252296,0.00379186,0.000328624,0.00005524885,9.099949e-8,0.0001171928,0.0003413969,0.9853966,0.007398945,0.0006192991,0.001868436],"study_design_scores_gemma":[0.0007731509,0.00004087214,0.0004421396,0.0008373779,0.0000585708,0.000001274191,0.0001514718,0.0044867,0.9873492,0.0005454012,0.005036413,0.0002773954],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3884658,0.0003624581,0.6094423,0.00004882102,0.00009386549,0.001115439,0.0002002844,0.0001079365,0.0001631461],"genre_scores_gemma":[0.9801956,0.000005765748,0.01788898,0.00001154496,0.00007624611,0.000629471,0.0001825362,0.00005274302,0.0009570789],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.5917299,"threshold_uncertainty_score":0.9999903,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003217113785356133,"score_gpt":0.2325024543909881,"score_spread":0.229285340605632,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}