{"id":"W4416038883","doi":"10.1021/acs.chemmater.5c01797","title":"Bismuth-oxo Clusters for Next Generation Extreme Ultraviolet Light Photolithography","year":2025,"lang":"en","type":"article","venue":"Chemistry of Materials","topic":"Inorganic Fluorides and Related Compounds","field":"Chemistry","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Victoria","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Research Chairs; Lawrence Berkeley National Laboratory; University of Victoria; Intel Corporation","keywords":"Photolithography; Extreme ultraviolet; Ultraviolet; Extreme ultraviolet lithography; Ultraviolet radiation","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.0001543173,0.0002311569,0.0003667204,0.00003777371,0.0001135838,0.0000850151,0.0002981821,0.0003440181,0.001196867],"category_scores_gemma":[0.00004437868,0.0002189239,0.0001564146,0.0001194043,0.00006963628,0.00006330739,0.0000514017,0.00008609469,0.00000413598],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004647379,"about_ca_system_score_gemma":0.00007092511,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000172351,"about_ca_topic_score_gemma":3.308509e-7,"domain_scores_codex":[0.9986857,0.000009426452,0.0005547486,0.0003427636,0.0001276475,0.0002797337],"domain_scores_gemma":[0.9991377,0.00004212368,0.0002124829,0.0004279513,0.0001254041,0.00005435293],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008661047,0.00006325065,0.00002254767,0.001139155,0.0001009514,0.000001654944,0.00006018994,0.000006699104,0.9924442,0.00008369628,0.00581352,0.000177555],"study_design_scores_gemma":[0.0008296873,0.000008052306,0.000005096517,0.000203216,0.00009788566,0.000008299668,0.0001020591,0.00008483141,0.9855227,0.0002352065,0.0126943,0.0002086025],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9873492,0.0004330277,0.0001436542,0.0002535868,0.0006079251,0.0001299813,0.0001347495,0.00008188669,0.01086596],"genre_scores_gemma":[0.9931484,0.00009133061,0.00049701,0.00007083912,0.0004490332,0.00006634686,0.0003362297,0.00002823149,0.005312574],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.006921405,"threshold_uncertainty_score":0.9997162,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02270123333547241,"score_gpt":0.2315417929752961,"score_spread":0.2088405596398237,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}