{"id":"W4416884624","doi":"10.37665/waknyjh62538","title":"Vacuum-Assisted Wet Processing for Advanced 3D Devices","year":2013,"lang":"","type":"article","venue":"Wafer-Level Packaging Symposium","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"MiQro Innovation Collaborative Centre; Dalsa Corporation","funders":"","keywords":"Fabrication; Oxide; Trench; Penetration (warfare); Immersion (mathematics); Priming (agriculture); Etching (microfabrication)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001189004,0.0001823438,0.000122773,0.0001230346,0.0001341667,0.0003279252,0.0002098369,0.000178986,0.001484086],"category_scores_gemma":[0.0001609537,0.0001860062,0.0001432117,0.0000907207,0.0001662013,0.0002729435,0.0002349706,0.0002880339,0.0003357287],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001982154,"about_ca_system_score_gemma":0.0001243449,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002566497,"about_ca_topic_score_gemma":0.0007276398,"domain_scores_codex":[0.9999225,0.000006953059,0.000003331365,0.000009735781,0.00004622956,0.00001119429],"domain_scores_gemma":[0.9999226,0.0000243854,0.00002334464,0.00001292214,0.0000130829,0.00000359813],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001058022,0.000007699908,0.000139624,0.00007369032,0.000003981762,0.00005942063,0.00002683432,0.00057027,0.9892166,0.0006203075,0.0002935732,0.008977353],"study_design_scores_gemma":[0.000005168094,0.0001035844,0.00132544,0.000007267706,0.000005388876,0.0002273108,0.0000329756,0.005139597,0.9839103,0.0002024998,0.009031218,0.000009188871],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8844709,0.006448552,0.0937553,0.0002812684,0.0003310556,0.00009754932,0.0004302789,0.001147378,0.01303765],"genre_scores_gemma":[0.958479,0.001307129,0.03696797,0.00009223518,0.00002530452,0.0000406273,0.0001480884,0.00007795142,0.00286175],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001484086,"threshold_uncertainty_score":0.004964769,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02035057806567968,"score_gpt":0.256711544592633,"score_spread":0.2363609665269533,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}