{"id":"W4416884624","doi":"10.37665/waknyjh62538","title":"Vacuum-Assisted Wet Processing for Advanced 3D Devices","year":2013,"lang":"","type":"article","venue":"Wafer-Level Packaging Symposium","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"MiQro Innovation Collaborative Centre; Dalsa Corporation","funders":"","keywords":"Fabrication; Oxide; Trench; Penetration (warfare); Immersion (mathematics); Priming (agriculture); Etching (microfabrication)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0005079298,0.001056919,0.0009442805,0.0007700357,0.0006705488,0.0008749074,0.0008821001,0.0004914959,0.000273545],"category_scores_gemma":[0.00005524116,0.001118322,0.0004766772,0.001353476,0.0001696456,0.001575025,0.0001434015,0.0005521506,0.0001745818],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000299251,"about_ca_system_score_gemma":0.0001873052,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00008338374,"about_ca_topic_score_gemma":0.00001400965,"domain_scores_codex":[0.9952241,0.0001120335,0.001387228,0.001173695,0.0005554303,0.001547557],"domain_scores_gemma":[0.996955,0.0002408945,0.0004805646,0.001049996,0.0007856986,0.0004878278],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0001031046,0.0006317524,0.005873614,0.00624517,0.0006154178,0.000008376527,0.00363635,0.0008092657,0.5282556,0.002749006,0.01618114,0.4348911],"study_design_scores_gemma":[0.007556029,0.0008445068,0.1005491,0.005929991,0.001275008,0.000127077,0.002258218,0.1936222,0.187719,0.002931519,0.4888813,0.008305964],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.076893,0.01375295,0.8286033,0.01279397,0.004414226,0.01203496,0.0006983342,0.008730853,0.04207844],"genre_scores_gemma":[0.8669572,0.0003140804,0.1271506,0.0005926304,0.0004099373,0.00158602,0.0001234898,0.0003092572,0.002556746],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.7900642,"threshold_uncertainty_score":0.9991267,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02035057806567968,"score_gpt":0.256711544592633,"score_spread":0.2363609665269533,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}