{"id":"W4416967295","doi":"10.1117/12.3095592","title":"Measurement methods for curvilinear patterns and application in lithography process development for silicon photonics","year":2025,"lang":"","type":"article","venue":"","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Microsemi (Canada)","funders":"","keywords":"Curvilinear coordinates; Lithography; Critical dimension; Wafer; Photonics; Miniaturization; Silicon; Surface finish; Enhanced Data Rates for GSM Evolution; Process (computing)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0008093004,0.0005490544,0.0002554588,0.001548019,0.0002870587,0.00076925,0.0006594703,0.0005103297,0.001784736],"category_scores_gemma":[0.002617415,0.0003974339,0.0002147857,0.001838547,0.0004843317,0.001170733,0.0007011159,0.000543051,0.0004442512],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005383103,"about_ca_system_score_gemma":0.0004545925,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006992609,"about_ca_topic_score_gemma":0.001121683,"domain_scores_codex":[0.9991,0.0001129707,0.00006758146,0.0002467992,0.0004310564,0.00004170062],"domain_scores_gemma":[0.9978786,0.000682263,0.0004970006,0.0003614771,0.0005332715,0.00004743605],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001572655,0.00009443425,0.007154977,0.0004327224,0.00002464811,0.0001738786,0.0003783784,0.01340186,0.5451558,0.007671036,0.0009196618,0.4244353],"study_design_scores_gemma":[0.00002505673,0.0003189895,0.01612931,0.00006246736,0.00003772345,0.001006406,0.0002343188,0.2603787,0.7033664,0.004487036,0.01381901,0.0001346254],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.05591289,0.0008431545,0.9394864,0.0000932015,0.00005174253,0.0001044732,0.000117368,0.001251749,0.002139128],"genre_scores_gemma":[0.2175995,0.0006537036,0.78012,0.00004355707,0.00001213897,0.00009193969,0.0001354948,0.0001295345,0.001214079],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.001784736,"threshold_uncertainty_score":0.005970538,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02184110508464249,"score_gpt":0.3630844616078774,"score_spread":0.341243356523235,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}