{"id":"W49370157","doi":"10.1007/978-3-642-16135-3_10","title":"Electrostatic MEMS: Modelling, Control, and Applications","year":2010,"lang":"en","type":"book-chapter","venue":"Lecture notes in control and information sciences","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":false,"ca_institutions":"Polytechnique Montréal","funders":"","keywords":"Microelectromechanical systems; Engineering; Control engineering; Range (aeronautics); Control system; Control (management); Bandwidth (computing); Architecture; Computer science; Systems engineering; Electronic engineering; Electrical engineering; Aerospace engineering; Artificial intelligence; Telecommunications; Nanotechnology; Materials science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001667042,0.0002129377,0.000273471,0.0002794477,0.0001488721,0.0001148887,0.0001363893,0.0003035601,0.000009013682],"category_scores_gemma":[0.00004274741,0.0001699489,0.00002637723,0.00007187039,0.0003331783,0.0007480252,0.00001542951,0.0004750825,0.000006001781],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001864975,"about_ca_system_score_gemma":0.00002494768,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000007628935,"about_ca_topic_score_gemma":0.00005630031,"domain_scores_codex":[0.9991786,0.000001396031,0.0003158704,0.0001443335,0.0001554417,0.0002043937],"domain_scores_gemma":[0.9994667,0.0002172343,0.0001035898,0.0001255902,0.00004704839,0.00003987733],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"theoretical_or_conceptual","study_design_scores_codex":[0.00003084143,0.000006351672,0.00003437339,0.0002821448,0.00006520817,0.000001183442,0.0005683444,0.1820859,0.007690963,0.1267167,0.00003682368,0.6824812],"study_design_scores_gemma":[0.001374417,0.0001480541,0.00003190686,0.0001056992,0.00004608886,0.00002229921,0.00001960591,0.2790385,0.001210422,0.3875794,0.3297501,0.0006735369],"study_design_candidate":"design_other","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.0003079954,0.003911371,0.9696325,0.0003479637,0.00009160174,0.0005640815,0.0000651794,0.0002261595,0.02485314],"genre_scores_gemma":[0.9801814,0.008930773,0.009012626,0.001220363,0.000151381,0.0002037915,0.00003127382,0.00002901754,0.0002393789],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.9798734,"threshold_uncertainty_score":0.6930315,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00692384577635189,"score_gpt":0.2120552890507734,"score_spread":0.2051314432744216,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}