{"id":"W51904940","doi":"10.1116/1.3368608","title":"Structural analysis of thin epitaxial Y2O3 films on sapphire","year":2010,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"","keywords":"Sapphire; Yttrium; Molecular beam epitaxy; Epitaxy; Materials science; Diffraction; Thin film; Analytical Chemistry (journal); Oxide; Diffusion; Crystallography; Optics; Chemistry; Nanotechnology; Laser; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001476325,0.000254975,0.000683744,0.002105108,0.0002527102,0.0001029813,0.0005359872,0.0003660925,0.00003077132],"category_scores_gemma":[0.0001025499,0.000200394,0.00004853613,0.001452611,0.001005909,0.0003074789,0.00008872364,0.0004877512,4.964298e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000608351,"about_ca_system_score_gemma":0.0001858969,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003214084,"about_ca_topic_score_gemma":0.0000156053,"domain_scores_codex":[0.9982307,0.00001810123,0.0006637772,0.000287243,0.0003283973,0.000471795],"domain_scores_gemma":[0.9988607,0.00001625088,0.0004692836,0.0002339208,0.0003548898,0.00006492783],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004838171,0.00002048146,0.0002352121,0.00006890929,0.0001582485,0.000002092382,0.0001485766,0.00004572771,0.9902611,0.002691096,0.00000595102,0.006314177],"study_design_scores_gemma":[0.0004061522,0.0003559084,0.0006094562,0.00006244327,0.000282037,0.00009172456,0.0001503001,0.0004788502,0.9922982,0.004893975,0.0001645655,0.0002063696],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9953796,0.003433597,0.00008591107,0.0002621366,0.0005938387,0.0001053122,0.000009510379,0.0001057087,0.00002436952],"genre_scores_gemma":[0.9985739,0.0004127224,0.0009178669,0.00002505349,0.00004706962,0.00000407791,0.000001104256,0.00001618177,0.000002009846],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.006107807,"threshold_uncertainty_score":0.817183,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009662875509286418,"score_gpt":0.2202516206034856,"score_spread":0.2105887450941992,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}