{"id":"W591973269","doi":"10.1016/b978-1-78548-015-7.50004-4","title":"Interconnects for Tomorrow","year":2015,"lang":"en","type":"book-chapter","venue":"Elsevier eBooks","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Interconnection; Materials science; Capacitive sensing; Dielectric; Plasma; Optoelectronics; Resistive touchscreen; Porous medium; Plasma etching; Etching (microfabrication); Power consumption; Porosity; Electrical engineering; Nanotechnology; Power (physics); Computer science; Composite material; Engineering; Telecommunications; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002162713,0.001645364,0.0004819067,0.001566301,0.001311633,0.002929261,0.0008041698,0.001183996,0.2592793],"category_scores_gemma":[0.0004225619,0.0004895254,0.0004464635,0.001592752,0.0003735575,0.002930202,0.00164544,0.001632817,0.1164352],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.001461231,"about_ca_system_score_gemma":0.001302109,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.003882438,"about_ca_topic_score_gemma":0.01498914,"domain_scores_codex":[0.9998307,0.00001372745,0.000006350302,0.00003612868,0.0000819803,0.00003111405],"domain_scores_gemma":[0.9998386,0.00001885648,0.000009712458,0.00002709699,0.00007491629,0.00003079512],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"not_applicable","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0000245773,0.00002705758,0.00007300754,0.0002622906,0.000006613932,0.00008635647,0.0001895901,0.0004418545,0.002286423,0.04628064,0.6449054,0.3054162],"study_design_scores_gemma":[0.000001094808,0.000006693642,0.00004311068,0.00007432338,0.000002577225,0.00004857564,0.0000360925,0.00009504882,0.0002250083,0.002888236,0.9965765,0.000002697788],"study_design_candidate":"not_applicable","study_design_consensus":"not_applicable","genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.001239062,0.02160203,0.009363348,0.002651234,0.005837018,0.0000448792,0.0005087148,0.001441215,0.9573125],"genre_scores_gemma":[0.001385165,0.003978644,0.001508507,0.0002764571,0.0002246607,0.00001357168,0.000169704,0.0002047263,0.9922387],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.2592793,"threshold_uncertainty_score":0.8673758,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03488445449320176,"score_gpt":0.2426651693503944,"score_spread":0.2077807148571926,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}