{"id":"W642366636","doi":"10.1016/b978-1-78548-015-7.50002-0","title":"Interaction Plasma/Dielectric","year":2015,"lang":"en","type":"book-chapter","venue":"Elsevier eBooks","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":1,"is_retracted":false,"has_abstract":false,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Materials science; Plasma-enhanced chemical vapor deposition; Plasma; Etching (microfabrication); Dielectric; Fabrication; Plasma etching; Chemical vapor deposition; Porosity; Interconnection; Low-k dielectric; Plasma processing; Deposition (geology); Nanotechnology; Optoelectronics; Chemical engineering; Composite material; Computer science; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow","insufficient_payload"],"consensus_categories":["insufficient_payload"],"category_scores_codex":[0.0004769486,0.0004058932,0.0005155569,0.0001461169,0.00009895391,0.0001075813,0.0003765067,0.0003830367,0.003584325],"category_scores_gemma":[0.000063888,0.0003254071,0.0002145682,0.0000117885,0.0001315975,0.00008032878,0.0001885269,0.0005313056,0.003285808],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003253033,"about_ca_system_score_gemma":0.0002023798,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003030434,"about_ca_topic_score_gemma":0.00005893795,"domain_scores_codex":[0.998113,0.00004027609,0.0004859307,0.0006243673,0.0004097524,0.0003266334],"domain_scores_gemma":[0.998583,0.00008674955,0.0002640763,0.0006394305,0.0002502555,0.0001764926],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00006046311,0.00001343139,5.269915e-7,0.00007416168,0.00002722047,0.00002525788,0.0002003129,0.000002696854,0.004766968,0.00316279,0.003410886,0.9882553],"study_design_scores_gemma":[0.0001876654,0.0001471558,0.000001049731,0.0002386311,0.00006817939,0.00004857511,0.00001002546,0.00003321677,0.003171279,0.01087213,0.9848281,0.0003940166],"study_design_candidate":"design_other","study_design_consensus":null,"genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.002366505,0.0006963645,0.000002105158,0.00007544141,0.002614015,0.0003983345,0.00003690989,0.0001554236,0.9936549],"genre_scores_gemma":[0.02119588,0.00003491954,0.0000954678,0.0001239046,0.0005844997,0.00002309738,0.00001576402,0.0000702101,0.9778563],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.9878613,"threshold_uncertainty_score":0.9999198,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02995994829256082,"score_gpt":0.2695906245235766,"score_spread":0.2396306762310158,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}