{"id":"W6929298966","doi":"10.48336/mt1z-sq73","title":"Design, modeling, and control of precision motion system for the wafer scanner systems","year":2025,"lang":"en","type":"article","venue":"Memorial University Research Repository (Memorial University)","topic":"Mosquito-borne diseases and control","field":"Medicine","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Memorial University of Newfoundland","funders":"","keywords":"Actuator; Motion control; Lithography; Motion system; Wafer; Scanner; Stepper; Piezoelectricity; Semiconductor device fabrication; Match moving","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002759723,0.0006034677,0.0005457589,0.0002840832,0.0004721583,0.001197506,0.0008813937,0.0007796687,0.003887095],"category_scores_gemma":[0.0003753091,0.000340955,0.0006687368,0.0002230296,0.0003915674,0.0006534461,0.000618375,0.0006670246,0.0009648026],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006273892,"about_ca_system_score_gemma":0.0008892429,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.003478118,"about_ca_topic_score_gemma":0.001825584,"domain_scores_codex":[0.9996994,0.00003702384,0.00001658521,0.00008691983,0.0001281784,0.00003189266],"domain_scores_gemma":[0.9998957,0.00001900765,0.00002266951,0.00001238125,0.00004410978,0.000006103556],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0001389845,0.00006356631,0.001709881,0.0006295052,0.00006038925,0.0004330654,0.0003168963,0.7567854,0.05964968,0.06676854,0.003665184,0.1097789],"study_design_scores_gemma":[0.00001854195,0.0001321457,0.0004822573,0.00002704554,0.0000196539,0.00009573629,0.00002696455,0.9808836,0.004144617,0.003135394,0.01101783,0.0000162239],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.01683607,0.001247362,0.9503999,0.000376788,0.0001521561,0.000181644,0.0001703431,0.0007392335,0.0298965],"genre_scores_gemma":[0.871905,0.002193528,0.1018377,0.0001219876,0.0001043333,0.0007043465,0.0003149194,0.00010413,0.02271405],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.003887095,"threshold_uncertainty_score":0.01300359,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0285096226296083,"score_gpt":0.2659883370580553,"score_spread":0.237478714428447,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}