{"id":"W6991119659","doi":"","title":"Fabrication and Characterization of a Quarter Micron Gate CMOS Using Ultra-thin Si Film(30nm) on SIMOX Substrates","year":2006,"lang":"en","type":"article","venue":"Tokyo Tech Research Repository (Tokyo Institute of Technology)","topic":"Advancements in Semiconductor Devices and Circuit Design","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"","funders":"","keywords":"Fabrication; Characterization (materials science); CMOS; Silicon; Quarter (Canadian coin); Substrate (aquarium); Integrated circuit","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001381721,0.0002142876,0.0002963086,0.0002035607,0.0002376958,0.0003229225,0.0005039496,0.0003252693,0.001052106],"category_scores_gemma":[0.0002687574,0.0002076939,0.0001228269,0.0002448726,0.0001499745,0.0003067015,0.0001420069,0.0001440842,0.0002448852],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003499208,"about_ca_system_score_gemma":0.0003838395,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001717807,"about_ca_topic_score_gemma":0.00383914,"domain_scores_codex":[0.9998971,0.000004457158,0.000005658306,0.0000288443,0.00004927759,0.00001468419],"domain_scores_gemma":[0.9996988,0.00005633986,0.00006764866,0.00005168479,0.00009930537,0.0000262316],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007428539,0.00001366233,0.0007891463,0.00006194594,0.0000100984,0.0001494392,0.00007084893,0.0002460082,0.9962864,0.0001216783,0.0001830987,0.001993352],"study_design_scores_gemma":[0.00002573556,0.000612294,0.01278662,0.0000107377,0.00003393006,0.0003206607,0.0001076713,0.005029267,0.9776896,0.00005871624,0.003312579,0.00001217687],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9918928,0.0003554378,0.004837968,0.00009746856,0.0000457926,0.00004317418,0.0005040708,0.0001968099,0.002026469],"genre_scores_gemma":[0.9858778,0.0002736173,0.01105727,0.00004529968,0.00001016111,0.00002960062,0.000270371,0.00002943448,0.002406605],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001717807,"threshold_uncertainty_score":0.003519654,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02717115424754323,"score_gpt":0.2765988202953372,"score_spread":0.2494276660477939,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}